Pellicle frame and pellicle
AssigneeNippon Light Metal Company, Ltd.
InventorsYoshihiro Taguchi, Takayuki Yamaguchi, Jun Yu, Yasuo Ishiwata
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AssigneeNippon Light Metal Company, Ltd.
InventorsYoshihiro Taguchi, Takayuki Yamaguchi, Jun Yu, Yasuo Ishiwata
Estimating the term…
The present invention provides a pellicle frame which can effectively inhibit deformation of an exposure master plate (8) caused by affixing the pellicle (1), and which does not have a complex shape, and a pellicle which uses said pellicle frame are provided. The pellicle frame with an anodized film on a surface of an aluminum alloy frame is characterized in that: the aluminum alloy frame comprises an aluminum alloy which contains Ca: 5.0 to 10.0% by weight with the remainder aluminum and unavoidable impurities are contained, and has an area (volume) ratio of an Al4Ca phase, which is a dispersed phase, is greater than or equal to 25%, and a crystal structure of a part of the Al4Ca phase is monoclinic; wherein the anodized film contains Al4Ca particles.
A pellicle frame with an anodized film on a surface of an aluminum alloy frame, characterized in that:
A method for manufacturing a pellicle frame, comprising:
Dependencies are inferred from the claim text.