Optical scanning device

An optical scanning device comprising:

• a mirror support including a first surface and a second surface, a mirror for reflecting a laser beam being formed on the first surface,
• a driving beam that includes a beam extending, in a direction orthogonal to a predetermined axis and is connected to the mirror support,
• a driving source that is formed on a surface of the beam and causes the mirror support to rotate around the predetermined axis;
• and
• a rib formed on the second surface of the mirror support at a position corresponding to the mirror, wherein
• the first surface of the mirror support includes an area where the mirror is formed and an exposed area where the first surface is exposed;
• the exposed area is formed by removing a surface membrane comprised of at least one of films forming the mirror from the first surface of the mirror support;
• and
• the surface membrane includes a silicon dioxide film formed on the first surface of the mirror support, an aluminum oxide film formed on an upper side of the silicon dioxide film, a silver-containing film formed on an upper side of the aluminum oxide film, and a reflection enhancing film formed on an upper side of the silver-containing film.

A method of manufacturing an optical scanning device, the method comprising:

• forming a mirror for reflecting a laser beam on a first surface of a mirror support;
• forming a rib on a second surface of the mirror support at a position corresponding to the mirror;
• forming a driving beam that includes a beam extending in a direction orthogonal to a predetermined axis and is connected to the mirror support;
• forming, on a surface of the beam, a driving source for causing the mirror support to rotate around the predetermined axis;
• and
• forming an exposed area where the first surface is exposed by removing a surface membrane comprised of at least one of films forming the mirror from the first surface of the mirror support.