Electronic device having a first electrode formed on a movable suspended mass opposing a second electrode formed on a cover layer

An electronic device, comprising:

• a single, unitary semiconductor substrate;
• a cavity embedded within the single, unitary semiconductor substrate, such that the single, unitary semiconductor substrate surrounds each surface of the cavity;
• a movably suspended mass defined in the single, unitary semiconductor substrate by one or more trenches extending from one side of the single, unitary semiconductor substrate to the cavity;
• a first electrode layer on the suspended mass;
• and
• a cover layer covering the suspended mass and including a second electrode layer arranged opposite to, and vertically above, the first electrode layer and spaced therefrom by a gap,
• wherein the first electrode layer includes a first set of comb like first electrode fingers;
• wherein the second electrode layer includes a second set of comb like second electrode fingers,
• wherein the first set of comb like electrode fingers comprises a first subset of first electrode fingers connected to a first voltage terminal and a second subset of first electrode fingers connected to a second, different voltage terminal,
• wherein the second set of comb like electrode fingers comprises a first subset of second electrode fingers operable to be charged according to a first polarity and a second subset of second electrode fingers operable to be charged according to a second polarity which is opposite to the first polarity,
• wherein the first electrode layer comprises recesses separating electrode fingers of the first set of comb like electrode fingers, and wherein the recesses extend into the movable suspended mass, and
• wherein the suspended mass is moveable at least between a first position, in which each first electrode finger of the first set of comb like first electrode fingers is aligned with a second electrode finger of the second set of comb like second electrode fingers, and a second position, in which each first electrode finger of the first set of comb like first electrode fingers is aligned with a space between two second electrode fingers of the second set of comb like second electrode fingers.