Method of and system for performing detection on or characterization of a sample

An atomic force microscope comprising:

• a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip;
• a detector to detect a deflection of the probe tip;
• an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a first predetermined force set point;
• and
• a vibrator in communication with the sample to provide a vibration having a modulation frequency to the sample,
• wherein the vibrator is controlled to provide the vibration to the sample in a modulation period after an initial sense period without modulation of the sample by the vibrator,
• wherein a surface topography measurement is performed during the initial sense period in which the sample is not modulated,
• wherein a subsurface characterization measurement is performed during the modulation period in which the sample is modulated, and
• wherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state.