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US 10,948,456 B1Granted
Gas analyzer system with ion source
AssigneeMKS Instruments, Inc.
InventorsGerardo A. Brucker, Timothy C. Swinney, Clinton L. Percy
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Abstract
A gas analyzer system uses an ionization source, which can be a hot cathode ionization source. A magnet assembly is positioned to define a magnetic field, which permits separation of ion components based on their mass to charge ratio. An ion beam deflector is used, such as a pair of deflector plates, which can scan ion components across a detector. The ion beam deflector defines a deflection electric field across the magnetic field and across a direction of travel of the ions emitted from the ionization source.
Claims22
A gas analyzer system, the system comprising:
- an ionization source configured to create a source electric field in an ionization region of the ionization source, the ionization region receiving a gas from a monitored chamber such that ions of the gas are formed in the ionization source;
- a source aperture positioned to emit a portion of the ions of the gas out of the ionization source, the ions being accelerated by the source electric field in a direction towards the source aperture;
- a magnet assembly positioned to define a magnetic field to angularly displace the emitted portion of the ions based on a mass to charge ratio of ions of the gas;
- an ion beam deflector positioned between the source aperture and the detector, the ion beam deflector defining a deflection electric field across the magnetic field and across a direction of travel of the emitted portion of the ions;
- a detector positioned to detect a displaced ion component of the emitted portion of the ions;
- and
- ion current measurement circuitry electrically connected to measure a current produced from receipt of the displaced ion component at the detector.
4 more elements
Dependencies are inferred from the claim text.