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US 10,948,448 B2Granted
Humidity sensor
AssigneeMINEBEA MITSUMI Inc.
InventorTaketomo Nakane
Life of this patent
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Abstract
A humidity sensor includes a lower electrode formed on a substrate, a first moisture sensitive layer covering the lower electrode, an upper electrode formed on the first moisture sensitive layer, and having a predetermined opening pattern including a plurality of openings, and a second moisture sensitive layer covering the upper electrode, and the second moisture sensitive layer contacts the first moisture sensitive layer at the openings of the upper electrode.
Claims19
A humidity sensor comprising:
- a lower electrode formed on a substrate;
- a first moisture sensitive layer covering the lower electrode;
- an upper electrode formed on the first moisture sensitive layer, and having a predetermined opening pattern including a plurality of openings;
- and
- a second moisture sensitive layer covering the upper electrode,
- wherein the second moisture sensitive layer contacts the first moisture sensitive layer at the openings of the upper electrode, and
- wherein an area of at least one of the openings is 2.92×10−6 to 1.0×10−2 times an area of the upper electrode including the openings.
4 more elements
A humidity sensor comprising:
- a lower electrode formed on a substrate;
- a first moisture sensitive layer covering the lower electrode;
- an upper electrode formed on the first moisture sensitive layer, and having a predetermined opening pattern including a plurality of openings;
- and
- a second moisture sensitive layer covering the upper electrode,
- wherein the second moisture sensitive layer contacts the first moisture sensitive layer at the openings of the upper electrode, and
- wherein a length of the openings is at least 1/350 to 1/10 a length of the upper electrode.
4 more elements
A humidity sensor comprising:
- a lower electrode formed on a substrate;
- a first moisture sensitive layer covering the lower electrode;
- an upper electrode formed on the first moisture sensitive layer, and having a predetermined opening pattern including a plurality of openings;
- and
- a second moisture sensitive layer covering the upper electrode,
- wherein the second moisture sensitive layer contacts the first moisture sensitive layer at the openings of the upper electrode, and
- wherein a thickness T1 of the first moisture sensitive layer and a thickness T2 of the second moisture sensitive layer,
- relationships T1<T2 and T2<=10*T1, where a symbol * denotes a multiplication.
5 more elements
Dependencies are inferred from the claim text.