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US 10,948,446 B2Granted
Chemiresistor gas sensor using MXene and the manufacturing method thereof
AssigneesKorea Advanced Institute of Science and Technology, Drexel University
InventorsHee-Tae Jung, Seon Joon Kim, Hyeong-Jun Koh, Yury Gogotsi
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Abstract
This invention relates to a chemiresistor gas sensor using MXene and a method of manufacturing the same, wherein the chemiresistor gas sensor, manufactured in a manner in which a Ti3C2Tx MXene thin film is formed and transferred onto a sensor substrate, can exhibit good response and sensitivity.
Claims8
A chemiresistor gas sensor, comprising:
- a substrate;
- an MXene thin film comprising imbedded Na+ ions formed on an aluminum oxide membrane formed on the substrate;
- and
- electrodes respectively formed on both sides of the MXene thin film,
- wherein,
- a limit of detection (LOD) enabling gas detection of the chemiresistor gas sensor is 50 ppb, and
- the chemiresistor gas sensor has a signal-to-noise ratio (SNR) of 230 or more for acetone, 345 or more for ethanol, 150 or more for ammonia, and 170 or more for propanol.
4 more elements
Dependencies are inferred from the claim text.