X-ray fluorescence analysis device, and spectrum display method used in same

Abstract

In order to identify fluorescent X-rays and diffracted X-rays in a software without changing a configuration of an X-ray fluorescence analysis apparatus and to display fluorescent X-ray information and diffracted X-ray information on peaks in a spectrum, the X-ray fluorescence analysis apparatus having an X-ray tube that emits X-rays to a sample and a detector that detects X-rays from the sample and generating and displaying a spectrum indicating a relationship between X-ray energy and an element content based on the X-rays detected by the detector, includes: an identification information generation unit that generates identification information specifying a peak position by a diffracted X-ray caused by a crystal structure of the sample; and a display control unit that displays the diffracted X-ray information on a peak in the spectrum based on the identification information.

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