X-ray spectroscopic analysis apparatus and elementary analysis method

An elemental analysis method, comprising:

• irradiating a predetermined irradiation area in a surface of a sample with an excitation beam, thereby generating characteristic X-rays from emission regions in the irradiation area, X-rays from each of emission regions having a range of wavelengths;
• making the characteristic X-rays generated at the predetermined irradiation area partly pass through a slit such that X-rays through the slit originate from the emission regions and have the range of wavelengths;
• making the X-rays through the slit enter into a planar analyzing crystal such that X-rays are selectively reflected on the analyzing crystal based on Bragg reflection law, the slit being provided between the irradiation area and the planar analyzing crystal and extending in a direction parallel to the irradiation area and a predetermined crystal plane of the planar analyzing crystal;
• obtaining a wavelength spectrum of the reflected X-rays by simultaneously detecting intensities of X-rays from the analyzing crystal by one of linear detection elements, the detection elements collectively forming an X-ray linear sensor, respectively, the X-ray linear sensor being provided so that an average energy resolution becomes 2 eV or less by arranging the linear detection elements, each having a length in a direction parallel to the slit, in a direction perpendicular to the slit;
• and
• one or both of identifying an element in the sample based on an energy of a peak of at least one of a Kα line, a Kβ line, an Lα line, and an Lβ line included in the wavelength spectrum, and determining an amount of the element based on an intensity of the peak, wherein
• each wavelength of the reflected X-rays is detected by corresponding one of the linear detection elements of the X-ray linear sensor, the detected wavelengths each corresponding to different linear portions defined on the emission regions in the irradiation area.