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US 10,948,432 B2Granted
Sample inspection apparatus employing a diffraction detector
AssigneesNottingham Trent University, Cranfield University
InventorsPaul Evans, Keith Rogers
Life of this patent
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Abstract
A sample inspection apparatus irradiates a sample with a conical shell of X-ray or similar radiation generating a plurality of Debye rings originating from a circular path on the sample. The apparatus is provided with two detectors. A first detector receives diffracted radiation and a second detector receives radiation which is transmitted through a coded aperture provided at a detection surface of the first detector.
Claims8
A sample inspection apparatus comprising:
- a source of electromagnetic radiation;
- a beam forming collimator for producing a substantially conical shell of radiation,
- a first radiation detector arranged to receive diffracted radiation after incidence of the conical shell beam upon a sample to be inspected;
- a coded aperture provided at a detection surface of the first radiation detector;
- and
- a range detector which is arranged to collect radiation transmitted through the coded aperture.
3 more elements
A method of inspecting a sample, comprising:
- providing a source of electromagnetic radiation;
- producing a substantially conical shell of radiation using a beam forming collimator;
- providing a first radiation detector arranged to receive diffracted radiation after incidence of the conical shell beam upon a sample to be inspected;
- providing a coded aperture provided at a detection surface of the first radiation detector;
- and
- providing a range detector which is arranged to collect radiation transmitted through the coded aperture.
3 more elements
Dependencies are inferred from the claim text.