Characterization of a material using combined laser-based IR spectroscopy and laser-induced breakdown spectroscopy
AssigneeNational Research Council of Canada
InventorsAlain Blouin, Mohamad Sabsabi, Jean-Pierre Monchalin, Francis Vanier
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Abstract
A method and a system for characterizing an elemental composition and a molecular composition of a material are provided. Laser-based IR spectroscopy measurements and LIBS measurements are performed at a same analysis spot on the material. The IR spectroscopy measurement data can be used to characterize the molecular composition of the material, whereas the LIBS data can be used to characterize the elemental composition of the material. 2D and 3D profiles of a sample of the material may be obtained based on this data.
Claims20
A method for characterizing an elemental composition and a molecular composition of a material, comprising:
- a. performing an infrared spectroscopic measurement on said material, said infrared spectroscopic measurement comprising probing said material at an analysis spot with an infrared laser beam and varying a wavelength of the infrared laser beam over a plurality of values in the infrared domain, and detecting, for each of said values, light in said infrared domain resulting from an interaction of the infrared laser beam with the material at said analysis spot, thereby obtaining a spectral variation of the interaction of the laser beam with the material at said analysis spot;
- b. performing a LIBS measurement on said material, said LIBS measurement comprising vaporizing a volume of the material at said analysis spot using a LIBS pulsed laser source, thereby obtaining a plasma of said material, and making a spectrally resolved detection of light from said plasma;
- wherein the infrared spectroscopic measurement of step a. and the LIBS measurement of step b. are performed at a plurality of locations of said material.
A system for characterizing an elemental composition and a molecular composition of material, comprising:
- an infrared spectroscopic module for performing an infrared spectroscopic measurement on said material, comprising:
- a spectrally tunable infrared laser source configured for generating an infrared laser beam and to vary a wavelength of the laser beam over a plurality of values in the infrared domain, the infrared laser source being arranged to probe an analysis spot on the material with said infrared laser beam;
- and
- a photodetector configured for detecting light in said infrared domain resulting from an interaction of the laser beam with the material at said analysis spot;
- and
- a LIBS module for performing a LIBS measurement on said sample, comprising:
- a LIBS pulsed laser source configured for vaporizing a volume of the sample at said analysis spot to obtain a plasma of said material;
- and
- a spectrally resolved light detector configured for detecting light from said plasma.
A system for characterizing an elemental composition and a molecular composition of material, comprising:
- an infrared spectroscopic module for performing an infrared spectroscopic measurement on said material, comprising:
- an infrared laser source comprising a dual-frequency comb optical generator configured to generate optically coherent first and second infrared laser beams defining respective optical frequency combs at different first and second frequency spacings, said infrared laser source being adapted to probe an analysis spot on the material using one or both of said first and second infrared laser beams;
- and
- a photodetector configured for detecting light in said infrared domain resulting from an interaction of one or both of said first and second infrared laser beams with the material at said analysis spot, the photodetector being further configured to detect a heterodyne signal resulting from an interference between said first and second optical frequency combs;
- and
- a LIBS module for performing a LIBS measurement on said sample, comprising:
- a LIBS pulsed laser source configured for vaporizing a volume of the sample at said analysis spot to obtain a plasma of said material;
- and
- a spectrally resolved light detector configured for detecting light from said plasma.
Dependencies are inferred from the claim text.