Far-infrared spectroscopy device
AssigneeHitachi High-Tech Corporation
InventorsKei Shimura, Mizuki Oku, Kenji Aiko
Life of this patent
Estimating the term…
Abstract
This far-infrared spectroscopy device is provided with: a variable wavelength far-infrared light source that generates first far-infrared light; an illuminating optical system that irradiates a sample with the first far-infrared light; a detecting nonlinear optical crystal that converts second far-infrared light into near-infrared light using pump light, said second far-infrared light having been transmitted from the sample; and a far-infrared image-forming optical system that forms an image of the sample in the detecting nonlinear optical crystal. The irradiation position of the first far-infrared light on the sample does not depend on the wavelength of the first far-infrared light.
Claims2
A far-infrared spectroscopy device, comprising:
- an illumination optical system;
- and
- a stage on which a sample is mounted and that is movable in at least one direction, wherein
- the illumination optical system is an anamorphic optical system, and
- when a wavelength of a first far-infrared light from a variable wavelength far-infrared light source is changed, the stage is moved in accordance with a change in an irradiation position of far-infrared light that is likely to occur on the sample surface, and the first far-infrared light is emitted to the same position of the sample.
Dependencies are inferred from the claim text.