Encoder, holding member, method of mounting an encoder, drive apparatus, and robot apparatus, and stage apparatus
AssigneeNikon Corporation
InventorYuichi Mitsuhashi
Life of this patent
Estimating the term…
Abstract
An encoder, including: a scale that has a pattern and is mountable to a rotary member of an object to be measured; a main body including a detector that detects the pattern, the main body being mountable to a non-rotating portion of the object to be measured; and a holding member including: an abutment portion that is removably provided to the main body from outside the main body and passes through the main body to abut the scale; and a pushing portion that is capable of pushing the abutment portion toward the scale.
Claims19
An encoder, comprising:
- a scale that has a pattern and is mountable to a rotary member of an object to be measured;
- a main body including a detector that detects the pattern, the main body being mountable to a non-rotating portion of the object to be measured;
- and
- a holding member including:
- an abutment portion that is removably provided to the main body from outside the main body and passes through the main body to abut the scale such that the scale is capable of rotating with respect to the rotary member;
- and
- a pushing portion that is capable of pushing the abutment portion toward the scale.
An encoder, comprising:
- a scale that has a pattern and is mountable to a rotary member of an object to be measured;
- a main body including a detector that detects the pattern, the main body being mountable to a non-rotating portion of the object to be measured;
- and
- a holding member including:
- an abutment portion that is removably provided to the main body from outside the main body and passes through the main body to abut the scale;
- and
- a pushing portion that is capable of pushing the abutment portion toward the scale, wherein
- the main body comprises a cover portion provided with a magnetic substance, and
- the pushing portion comprises a magnet that is arranged at a part of the holding member located outside the main body and pushes the abutment portion toward the scale by magnetic force acting between the magnet and the magnetic substance.
An encoder, comprising:
- a scale that has a pattern and is mountable to a rotary member of an object to be measured;
- a main body including a detector that detects the pattern, the main body being mountable to a non-rotating portion of the object to be measured;
- and
- a holding member including:
- an abutment portion that is removably provided to the main body from outside the main body and passes through the main body to abut the scale;
- and
- a pushing portion that is capable of pushing the abutment portion toward the scale, wherein
- the scale is mounted with use of a second fixation member,
- the holding member includes a guiding portion that guides the second fixation member to the scale from outside the holding member, and
- the guiding portion is provided so as to allow an adjustment tool that adjusts a rotation position of the scale to be inserted in the guiding portion.
An encoder, comprising:
- a scale that has a pattern and is mountable to a rotary member of an object to be measured;
- a main body including a detector that detects the pattern, the main body being mountable to a non-rotating portion of the object to be measured;
- a holding member including:
- an abutment portion that is removably provided to the main body from outside the main body and passes through the main body to abut the scale;
- and
- a pushing portion that is capable of pushing the abutment portion toward the scale;
- and
- a scale movement restricting portion capable of restricting movement of the scale toward the non-rotating portion by the holding member.
A holding member to be used to mount an encoder that comprises:
- a scale that has a pattern and is mountable to a rotary member of an object to be measured;
- and
- a main body including a detector that detects the pattern, the main body being mountable to a non-rotating portion of the object to be measured,
- the holding member comprising:
- an abutment portion that is removably provided to the main body from outside the main body and passes through the main body to abut the scale such that the scale is capable of rotating with respect to the rotary member;
- and
- a pushing portion that is capable of pushing the abutment portion toward the scale.
A method of mounting an encoder that comprises:
- a scale having a pattern;
- and
- a main body including a detector that detects the pattern,
- the method comprising:
- a first fixation step of fixing the main body to a non-rotating portion of an object to be measured by using a first fixation member;
- an adjustment step of adjusting a position of the scale in a rotation direction with respect to a rotary member of the object to be measured, in a state in which a holding member including an abutment portion that abuts the scale and a pushing portion capable of pushing the abutment portion toward the scale is mounted to the main body from outside the main body;
- and
- a second fixation step of fixing, after the rotation position is adjusted, the scale to the rotary member by using a second fixation member in a state in which the scale is held by the abutment portion pushed by the pushing portion.
Dependencies are inferred from the claim text.