Measuring device and method for obtaining amount of deviation of measuring device
AssigneeTokyo Electron Limited
InventorsKippei Sugita, Daisuke Kawano
Life of this patent
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AssigneeTokyo Electron Limited
InventorsKippei Sugita, Daisuke Kawano
Estimating the term…
A measuring device includes a disc-shaped base substrate, sensor electrodes arranged circumferentially along a periphery of the base substrate, a high frequency oscillator configured to apply a high frequency signal to the sensor electrodes, C/V conversion circuits, each being configured to convert a voltage amplitude at a corresponding sensor electrode among the sensor electrodes to a voltage signal indicating an electrostatic capacitance, an A/D converter configured to convert the voltage signal outputted from each of the C/V conversion circuits to a digital value, and a switching mechanism configured to switch each sensor electrode of the sensor electrodes between a first state in which the sensor electrodes are electrically connected to the C/V conversion circuits and a second state in which electrode pairs are connected to different C/V conversion circuits among the C/V conversion circuits. Each electrode pair includes circumferentially adjacent two sensor electrodes among the sensor electrodes.
A measuring device comprising:
Dependencies are inferred from the claim text.