Optical profilometer with color outputs
AssigneeFilmetrics, Inc.
InventorScott A. Chalmers
Life of this patent
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Abstract
A system includes a light source configured to selectively output light. An optical objective is configured to couple the output light from the light source to a sample under measurement when present, and direct reflected light from the sample. A controller is configured to automatically control a color of the output light and a vertical position of the optical objective relative to the sample. The color of the light is selected from multiple colors. The vertical position includes a range of vertical positions scanned by the objective. A detector is configured to receive the reflected light and to detect focus, and output data representing a surface profile of the sample. The output data includes color images of the surface profile.
Claims75
A system comprising:
- a light source configured to selectively output light;
- an aperture positioned in an optical path between the light source and the optical objective;
- a collimator lens positioned in the optical path between the aperture and the optical objective;
- an optical objective configured to couple the light from the light source to a sample under measurement when present, and direct reflected light from the sample;
- a detector configured to receive the reflected light and to detect focus, and output data representing a surface profile of the sample, wherein the data includes color images of the surface profile;
- and
- a controller configured to automatically control a color of the output light and a vertical position of the optical objective relative to the sample, wherein the color is selected from a plurality of colors, wherein the vertical position includes a range of vertical positions scanned by the objective, wherein the controller is configured to control a focus search using vertical scanning and data collection at each of a plurality of pixels in one of the color images of a surface of the sample when present.
A method comprising:
- directing light from a light source through a collimator lens;
- directing light from the collimator lens to an optical objective;
- configuring the optical objective to couple output light from the light source to a sample under measurement when present, and direct reflected light from the sample;
- configuring a controller to automatically control a color of the output light by selecting the color from a plurality of colors;
- configuring the controller to automatically control a vertical position of the optical objective relative to the sample, wherein the vertical position includes a range of vertical positions scanned by the objective;
- configuring a detector to receive the reflected light and to detect focus, and to output data representing a surface profile of the sample, wherein the data includes color images of the surface profile;
- and
- configuring the controller to control a focus search using vertical scanning and data collection at each of a plurality of pixels in one of the color images of a surface of the sample.
A method comprising:
- directing light from a light source through a collimator lens;
- directing light from the collimator lens to an optical objective;
- controlling the optical objective to couple output light from the light source to a sample under measurement, and direct reflected light from the sample;
- automatically controlling a color of the output light by selecting the color from a plurality of colors;
- automatically controlling a vertical position of the optical objective relative to the sample, wherein the vertical position includes a range of vertical positions scanned by the objective;
- receiving the reflected light at a detector and detecting focus;
- configuring a controller to control a focus search using vertical scanning and data collection at each of a plurality of pixels in an image of a surface of the sample;
- and
- outputting data representing a surface profile of the sample, wherein the data includes color images of the surface profile.
Dependencies are inferred from the claim text.