Micro-electromechanical transducer
AssigneeSonion Nederland B.V.
InventorsRaymond Mögelin, Dion Ivo de Roo, Frederik Cornelis Blom, Alwin Fransen, Pavlo Mulyar, Peter Christiaan Post
Life of this patent
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Abstract
A micro-electromechanical transducer including one or more moveable members, and a viscoelastic substance having a predetermined viscoelasticity, the viscoelastic substance being adapted to influence the response of the transducer in a predetermined manner. The micro-electromechanical transducer of the present invention may include a MEMS transducer, such as a MEMS microphone, a MEMS vibration sensor, a MEMS acceleration sensor, a MEMS receiver.
Claims18
A micro-electromechanical transducer comprising
- one or more moveable members including an opening in the form of a compensation hole, a hinged portion, and a free hanging portion,
- one or more moveable masses secured to respective ones of the one or more moveable members, and
- a reflowable viscoelastic substance having a predetermined viscoelasticity,
- wherein each of the one or more moveable masses comprises an opening in the form of a compensation hole being aligned with an opening in the moveable member to which a moveable mass is secured.
A micro-electromechanical transducer comprising
- a MEMS microphone,
- an add-on assembly secured to the MEMS microphone, said add-on assembly comprising
- a spacer secured to the MEMS microphone,
- a moveable member having a frame structure, said frame structure being secured to the spacer,
- a moveable mass being secured to the moveable member, said moveable mass comprising an opening in the form of a compensation hole being aligned with an opening in the moveable member,
- a viscoelastic substance having a predetermined viscoelasticity, wherein the viscoelastic substance forms a suspension member and a seal between the moveable member and the frame structure, and
- a cover secured to the spacer.
A micro-electromechanical transducer comprising:
- one or more moveable members,
- one or more moveable masses for influencing the response of the transducer, and
- a reflowable damping arrangement,
- wherein each of the one or more moveable masses includes an opening in the form of a compensation hole being aligned with an opening in a corresponding one of the one or more moveable members to which the each of the one or more moveable masses is secured.
A micro-electromechanical transducer comprising
- one or more moveable members, wherein an opening in the form of a compensation hole is provided in the one or more movable members,
- one or more moveable masses secured to respective ones of the one or more moveable members, and
- a reflowable viscoelastic substance having a predetermined viscoelasticity, wherein each of the one or more moveable masses includes an opening in the form of a compensation hole being aligned with an opening in the moveable member to which a moveable mass is secured.
Dependencies are inferred from the claim text.