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US 10,947,107 B2Granted
Device and method of fabricating such a device
AssigneeThe University of Manchester
InventorsAravind Vijayaraghavan, Christian Berger
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Abstract
There is disclosed a device and method for fabricating such a device. The device includes cavities formed in a substrate. A laminated membrane is mounted to the substrate and spans the cavities. The laminated membrane includes a layer of a flexible material, typically a polymer, and a layer of a two-dimensional material that is typically graphene.
Claims28
A device comprising:
- a substrate with at least one cavity therein;
- a flexible laminated membrane mounted to the substrate, wherein the flexible laminated membrane spans at least part of the cavity, and wherein the flexible laminated membrane includes at least one layer of a flexible dielectric material and at least one layer of a two-dimensional material, wherein the substrate comprises a planar mounting surface supporting the flexible laminated membrane and the cavity comprises at least one inwardly tapered surface;
- and
- a functional component, wherein the flexible laminated membrane is arranged to deform with respect to a position of the functional component.
1 more element
A method of fabricating a device, the method comprising:
- forming a substrate having a planar mounting surface, the substrate with at least one cavity having at least one inwardly tapered surface therein, and
- mounting a flexible laminated membrane to the planar mounting surface of the substrate so that the flexible laminated membrane spans at least part of the cavity, and wherein the flexible laminated membrane includes at least one layer of a flexible dielectric material and at least one layer of a two-dimensional material;
- and
- mounting a functional component to the substrate, wherein the flexible laminated membrane is arranged to deform with respect to a position of the functional component.
1 more element
Dependencies are inferred from the claim text.