Base material processing apparatus and detection method
AssigneeSCREEN Holdings Co., Ltd.
InventorMitsuhiro Yoshida
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AssigneeSCREEN Holdings Co., Ltd.
InventorMitsuhiro Yoshida
Estimating the term…
A displacement amount calculation part in a base material processing apparatus calculates the degree of matching between an upstream data section and a downstream data section included in an upstream and a downstream detection results, which indicate time-varying changes in the positions of an edge of the base material in the width direction at an upstream and a downstream detection positions. This calculation uses the results of comparison between signals in a predetermined frequency band extracted from the upstream detection result and signals in the predetermined frequency band extracted from the downstream detection result. Accordingly, a downstream data section that is highly matched with the upstream data section can be identified with high accuracy, and the amount of displacement of the base material in the transport direction can be detected with high accuracy on the basis of an identification result.
A base material processing apparatus comprising:
Dependencies are inferred from the claim text.