Composition, imprinting ink and imprinting method
AssigneeKoninklijke Philips N.V.
InventorsMarcus Antonius Verschuuren, Remco Van Brakel
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Abstract
Disclosed is a silane-based composition for forming an imprinting ink for imprint lithography applications in which the crosslinking of the silanes in the composition is suppressed by the inclusion of a compound of Formula 3: wherein R9 is selected from the group consisting of C1-C6 linear or branched alkyl groups and a phenyl group, and wherein n is a positive integer having a value of at least 2. An ink may be formed by adding a PAG, photoinitiator or TAG to the composition such upon their activation, the crosslinking reaction is completed. An imprinting method using 10 such an ink is also disclosed.
Claims26
A composition for forming an imprinting ink, the composition comprising:
- a dissolved condensation product of:
- at least one of a first silane compound of Formula 1 and a second silane compound of Formula 2;
- and
- a compound of Formula 3 acting as an inhibitor of polycondensation reaction of the compounds of Formula 1 or 2 at a defined pH:
- wherein R1-R9 are individually selected from the group consisting of C1-C6 linear or branched alkyl groups and a phenyl group, and wherein n is a positive integer having a value of at least 2;
- the composition further comprising:
- a protic acid such that the composition has a pH in the range of 3-5;
- and
- an organic solvent system comprising a primary or a secondary alcohol and water wherein the compound of Formula 3 is selected from, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, tetraethylene glycol monomethyl ether and tetraethylene glycol monoethyl ether.
An imprinting ink comprising a composition that includes:
- a dissolved condensation product of:
- at least one of a first silane compound of Formula 1 and a second silane compound of Formula 2;
- and
- a compound of Formula 3 acting as an inhibitor of polycondensation reaction of the compounds of at least one of Formula 1 and 2 at a defined pH:
- wherein R1-R9 are individually selected from the group consisting of C1-C6 linear or branched alkyl groups and a phenyl group, and wherein n is a positive integer having a value of at least 2;
- the composition further comprising:
- a protic acid such that the composition has a pH in the range of 3-5;
- and
- an organic solvent system comprising a primary or a secondary alcohol and water, wherein the imprinting ink further comprises one of a photo-acid generator, a photo-initiator and a thermal acid generator and wherein the compound of Formula 3 is selected from, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, tetraethylene glycol monomethyl ether and tetraethylene glycol monoethyl ether.
Use of an imprinting ink for an imprinting process, the imprinting ink comprising a composition that includes:
- a dissolved condensation product of:
- at least one of a first silane compound of Formula 1 and a second silane compound of Formula 2;
- and
- a compound of Formula 3 acting as an inhibitor of polycondensation reaction of the compounds of Formula 1 or 2 at a defined pH:
- wherein R1-R9 are individually selected from the group consisting of C1-C6 linear or branched alkyl groups and a phenyl group, and wherein n is a positive integer having a value of at least 2;
- the composition further comprising:
- a protic acid such that the composition has a pH in the range of 3-5;
- and
- an organic solvent system comprising a primary or a secondary alcohol and water wherein the compound of Formula 3 is selected from, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, tetraethylene glycol monomethyl ether and tetraethylene glycol monoethyl ether.
Dependencies are inferred from the claim text.