Tool for ultrasonic bonding and apparatus for ultrasonic bonding
AssigneeToshiba Mitsubishi-Electric Industrial Systems Corporation
InventorsAkihiro Ichinose, Yoshihito Yamada
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Abstract
A bonding tool as the tool for ultrasonic bonding includes a plurality of protrusion portions in a protrusion region at a contact tip portion. The plurality of protrusion portions are equally spaced at a longitudinal direction interval in an X direction as the longitudinal direction of the protrusion region, and an X direction outermost protrusion portion positioned outermost in the X direction is disposed separately from a side edge of the protrusion region in the X direction by a longitudinal direction side edge distance. The plurality of protrusion portions are disposed so that a first disposition condition {0.349≤EX (the longitudinal direction side edge distance/DX (the longitudinal direction interval)≤0.510} is satisfied.
Claims7
A tool for ultrasonic bonding used for an ultrasonic vibration bonding apparatus configured to pressurize, from above, a bonding target material disposed on a surface of a substrate and apply ultrasonic vibration to said bonding target material to bond said bonding target material onto the surface of said substrate, wherein
- a protrusion region that contacts with said bonding target material at application of ultrasonic vibration is provided at a tip portion of said tool for ultrasonic bonding,
- said protrusion region includes a plurality of convex portions formed separately from each other, said plurality of convex portions each having a predetermined tip portion curvature more than “0” from a middle part of the protrusion region to a top part of the protrusion region, said plurality of convex portions being equally spaced at a first interval in a first direction, said first direction being a longitudinal direction of said protrusion region,
- a first direction outermost convex portion positioned outermost in said first direction among said plurality of convex portions is disposed separately from an end part of said protrusion region in said first direction by a first direction end part distance, and
- said plurality of convex portions are disposed so that a first disposition condition {0.349≤EX/DX≤0.510} is satisfied where DX represents said first interval and EX represents said first direction end part distance.
Dependencies are inferred from the claim text.