System and method for fluid dispense and coverage control
AssigneeTokyo Electron Limited
InventorAnton J. deVilliers
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Abstract
Techniques herein include systems and methods for dispensing liquids on a substrate with real-time coverage control and removal control. Techniques also encompass quality control of dispense systems. Systems and methods enable visual examination of liquids progressing on a surface of a substrate. This includes capturing and/or examining stroboscopic images of movement of a given liquid on a working surface of a substrate, and then generating feedback data for modifying a corresponding dispense. Dispenses can be modified by increasing/decreasing a dispense rate and increasing/decreasing a rotational velocity of a substrate. Feedback can be generated by automated and/or manual analysis of real time progression as well as post-process analysis of collections of images.
Claims6
A method of quality control, the method comprising:
- obtaining stroboscopic images of a plurality of substrates, the stroboscopic images showing a first liquid on a working surface of each substrate, the first liquid having been dispensed onto the working surface of each substrate during rotation of each substrate;
- identifying a first set of sample stroboscopic images that includes a given stroboscopic image for substrates of the plurality of substrates;
- compiling sample stroboscopic images from the first set of sample stroboscopic images into a video;
- and
- displaying the video, the video showing stroboscopic images across the plurality of substrates.
Dependencies are inferred from the claim text.