Paddle, plating apparatus equipped with the paddle, and plating method
AssigneeEbara Corporation
InventorsYasuyuki Masuda, Masashi Shimoyama, Jumpei Fujikata, Yohei Wakuda, Shao Hua Chang
Life of this patent
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Abstract
A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate is disclosed. The paddle includes a plurality of vertically-extending agitation rods. Each agitation rod includes: a planar portion perpendicular to a reciprocating direction of the paddle; two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces being symmetric with respect to a center line of the agitation rod, the center line being perpendicular to the planar portion; and a tip portion connected with the two slope surfaces.
Claims7
A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate, comprising:
- a plurality of vertically-extending agitation rods,
- wherein each of the agitation rods includes:
- a planar portion perpendicular to a reciprocating direction of the paddle, the planar portion forming a swirling flow of the plating solution that pulls the plating solution that has come into contact with the substrate back toward the paddle;
- two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces being symmetric with respect to a center line of the agitation rod, the center line being perpendicular to the planar portion, the two slope surfaces forming a flow that pushes the plating solution toward the surface of the substrate;
- and
- a tip portion connected with the two slope surfaces, the tip portion facing in the reciprocating direction of the paddle,
- wherein the agitation rods comprise first agitation rods facing in the same one direction and second agitation rods facing in the opposite direction, and
- wherein the first agitation rods and the second agitation rods are arranged alternately.
A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate, comprising:
- a plurality of vertically-extending agitation rods,
- wherein each of the agitation rods includes:
- a planar portion perpendicular to a reciprocating direction of the paddle, the planar portion forming a swirling flow of the plating solution that pulls the plating solution that has come into contact with the substrate back toward the paddle;
- two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces forming a flow that pushes the plating solution toward the surface of the substrate;
- and
- a tip portion connected with the two slope surfaces, the tip portion facing in the reciprocating direction of the paddle,
- wherein the agitation rods comprise first agitation rods and second agitation rods which face in opposite directions and are arranged alternately, and
- wherein a distance between planar portions of a first agitation rod and an adjacent second agitation rod, facing away from each other, of the agitation rods is larger than a distance between tip portions of a first agitation rod and an adjacent second agitation rod, facing each other, of the agitation rods.
A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate, comprising:
- a plurality of vertically-extending agitation rods,
- wherein each of the agitation rods includes:
- a planar portion perpendicular to a reciprocating direction of the paddle;
- two slope surfaces extending from side ends of the planar portion in directions closer to each other;
- and
- a tip portion connected with the two slope surfaces,
- wherein the agitation rods comprise first agitation rods and second agitation rods which face in opposite directions and are arranged alternately, and
- wherein a distance between planar portions of a first agitation rod and an adjacent second agitation rod, facing away from each other, of the agitation rods is larger than a distance between tip portions of a first agitation rod and an adjacent second agitation rod, facing each other, of the agitation rods, and
- wherein a volume of a first flow passage formed between the first agitation rod and the adjacent second agitation rod facing away from each other is equal to a volume of a second flow passage formed between the first agitation rod and the adjacent second agitation rod facing each other.
Dependencies are inferred from the claim text.