# US 10,945,707 B2 · Ultrasonic transducer device, ultrasonic probe, and ultrasonic apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,945,707 B2 - Document ID: US10945707B2 - Status: Granted - Kind: B2 - Application number: 15/800,543 - Filed: 2017-11-01 - Published: 2018-05-17 - Granted: 2021-03-16 - Earliest claimed: 2016-11-16 - Assignees: Seiko Epson Corporation - Applicants: Seiko Epson Corporation - Inventors: Jiro Tsuruno - Web page: https://patentgrep.com/patent/US10945707B2 ## CPC - A61B 8/4483: {characterised by features of the ultrasound transducer} - A61B 8/4444: {related to the probe} - B06B 1/0607: {using multiple elements (B06B1/064 and B06B1/0688 take precedence)} - G01S 7/52079: {Constructional features (constructional features of transducers B06B; mounting transducers G10K11/00; constructional features of ultrasonic medical diagnostic devices A61B8/44)} - G01S 15/8925: {the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays} - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) - B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R) - G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES ## Abstract An ultrasonic transducer device includes a first substrate that is provided with a plurality of ultrasonic transducer elements arranged in a matrix, and a plurality of first wires via which the ultrasonic transducer elements are electrically connected to each other as a plurality of serial sets, and a second substrate that is provided to overlap the first substrate, and is provided with a plurality of second wires intersecting the first wires in a plan view from a thickness direction of the first substrate and third wires via which the first wires are electrically connected to the second wires. ## Claims ### Claim 1 An ultrasonic transducer device comprising: a first substrate that is provided with a plurality of ultrasonic transducer elements arranged in a matrix, and a plurality of first wires via which the ultrasonic transducer elements are electrically connected to each other as a plurality of serial sets; and a second substrate that is provided to overlap the first substrate, and is provided with a plurality of second wires intersecting the first wires in a plan view from a thickness direction of the first substrate and third wires via which the first wires are electrically connected to the second wires, wherein the third wires include: through electrodes that penetrate through the second substrate in the thickness direction and are connected to the second wires, and conductive protrusions protruding toward the thickness direction via which the through electrodes are connected to the first wires, and wherein, for each corresponding through electrode, conductive protrusion, and transducer element, the conductive protrusions are disposed on a side of the through electrodes that is closer to the ultrasonic transducer elements in the thickness direction. ### Claim 2 (depends on 1) The ultrasonic transducer device according to claim 1, wherein the number of ultrasonic transducer elements electrically connected as the serial sets is two or more and five or less. ### Claim 3 (depends on 2) An ultrasonic probe comprising: an ultrasonic transducer device that receives an ultrasonic wave and outputs an electrical signal, wherein the ultrasonic transducer device is the ultrasonic transducer device according to claim 2. ### Claim 4 (depends on 2) An ultrasonic apparatus comprising: an ultrasonic transducer device that receives an ultrasonic wave and outputs an electrical signal; a converter that converts the electrical signal output from the ultrasonic transducer device into a data signal; and a display that displays the data signal, wherein the ultrasonic transducer device is the ultrasonic transducer device according to claim 2. ### Claim 5 (depends on 1) An ultrasonic probe comprising: an ultrasonic transducer device that receives an ultrasonic wave and outputs an electrical signal, wherein the ultrasonic transducer device is the ultrasonic transducer device according to claim 1. ### Claim 6 (depends on 1) An ultrasonic apparatus comprising: an ultrasonic transducer device that receives an ultrasonic wave and outputs an electrical signal; a converter that converts the electrical signal output from the ultrasonic transducer device into a data signal; and a display that displays the data signal, wherein the ultrasonic transducer device is the ultrasonic transducer device according to claim 1. ### Claim 7 An ultrasonic transducer device comprising: a substrate; a plurality of second wires that are provided on the substrate; an insulating film that is provided to overlap the second wires; a plurality of ultrasonic transducer elements that are provided on the insulating film and are arranged in a matrix; a plurality of first wires via which the ultrasonic transducer elements are electrically connected to each other as a plurality of serial sets and that intersect the second wires in a plan view from a thickness direction of the substrate; and third wires via which the first wires are electrically connected to the second wires, wherein the third wires include: through electrodes that penetrate through the substrate in the thickness direction and are connected to the second wires, and conductive protrusions protruding toward the thickness direction via which the through electrodes are connected to the first wires, and wherein, for each corresponding through electrode, conductive protrusion, and transducer element, the conductive protrusions are disposed on a side of the through electrodes that is closer to the ultrasonic transducer elements in the thickness direction. ### Claim 8 (depends on 7) The ultrasonic transducer device according to claim 7, wherein the number of ultrasonic transducer elements electrically connected as the serial sets is two or more and five or less. ### Claim 9 (depends on 8) An ultrasonic probe comprising: an ultrasonic transducer device that receives an ultrasonic wave and outputs an electrical signal, wherein the ultrasonic transducer device is the ultrasonic transducer device according to claim 8. ### Claim 10 (depends on 8) An ultrasonic apparatus comprising: an ultrasonic transducer device that receives an ultrasonic wave and outputs an electrical signal; a converter that converts the electrical signal output from the ultrasonic transducer device into a data signal; and a display that displays the data signal, wherein the ultrasonic transducer device is the ultrasonic transducer device according to claim 8. ### Claim 11 (depends on 7) An ultrasonic probe comprising: an ultrasonic transducer device that receives an ultrasonic wave and outputs an electrical signal, wherein the ultrasonic transducer device is the ultrasonic transducer device according to claim 7. ### Claim 12 (depends on 7) An ultrasonic apparatus comprising: an ultrasonic transducer device that receives an ultrasonic wave and outputs an electrical signal; a converter that converts the electrical signal output from the ultrasonic transducer device into a data signal; and a display that displays the data signal, wherein the ultrasonic transducer device is the ultrasonic transducer device according to claim 7.