Methods and apparatus for a microwave batch curing process

A process chamber for a microwave batch curing process, comprising:

• a plurality of annular bodies in a stacked configuration, wherein each annular body comprises:
• an outer surface and an inner surface defining a central opening of the annular body, wherein the inner surface comprises a plurality of angled surfaces, and wherein the pluralities of angled surfaces of the plurality of annular bodies together define a first volume;
• a first lip extending radially outward from the outer surface of the annular body proximate a first end of the annular body;
• a second lip extending radially outward from the outer surface of the annular body proximate a second end of the annular body;
• an exhaust disposed between the first lip and the second lip and fluidly coupled to the first volume, wherein the exhaust comprises a plurality of first openings;
• a plurality of second openings fluidly coupled to the first volume, wherein the plurality of second openings are configured to expose the first volume to microwave energy, wherein the plurality of second openings comprises a pair of second openings that are diametrically opposed to each other and have a direct line of sight to each other, and wherein each second opening has angled sidewalls such that each second opening increases in cross sectional area as the second opening extends from the outer surface to the inner surface wherein the plurality of second openings comprises a pair of second openings that are diametrically opposed to each other and have a direct line of sight to each other;
• and
• one or more ports fluidly coupled to the first volume;
• a lid disposed atop a topmost annular body to seal an upper portion of the first volume;
• and
• a substrate transfer apparatus disposed beneath and coupled to a bottommost annular body for transferring a plurality of substrates into and out of the first volume.

A method of performing a microwave batch curing process, comprising:

• inserting a plurality of substrates into a process chamber comprising an annular body having an outer surface and an inner surface defining a central opening of the annular body, wherein the inner surface comprises a plurality of angled surfaces defining a first volume;
• a first lip extending radially outward from the outer surface of the annular body proximate a first end of the annular body;
• a second lip extending radially outward from the outer surface of the annular body proximate a second end of the annular body;
• an exhaust disposed between the first lip and the second lip and fluidly coupled to the first volume, wherein the exhaust comprises a plurality of first openings;
• a plurality of second openings fluidly coupled to the first volume and formed through the annular body, wherein the plurality of second openings are configured to expose the first volume to microwave energy, wherein the plurality of second openings comprises a pair of second openings that are diametrically opposed to each other and have a direct line of sight to each other, and wherein each second opening has a plurality of angled sidewalls such that each second opening increases in cross sectional area as the second opening extends from the outer surface to the inner surface;
• and one or more ports fluidly coupled to the first volume;
• forming a vacuum within the process chamber;
• and
• exposing the plurality of substrates within the process chamber to microwaves.