High temperature substrate heater for use in high and ultra-high vacuum systems
AssigneeTriad National Security, LLC
InventorsPaul Dowden, Quanxi Jia
Life of this patent
Estimating the term…
Abstract
A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.
Claims19
A braze-free device for heating a substrate, the braze-free device comprising:
- a heater block body,
- a heater block lid on the heater block body;
- and
- a heating element between the heater block lid and the heater block body;
- the heating element being compressed between the heater block body and the heater block lid along a first direction between the heater block lid and the heater block body to deform the heating element along the first direction,
- the heating element being in continuous physical and thermal contact with the heater block lid and the heater block body without including a braze alloy,
- wherein the heating element comprises a resistive heating wire having an outer protective sheath, and a compressed outer diameter of the resistive heating wire in the first direction is about 2.5% to about 20% of an uncompressed outer diameter of the resistive heating wire.
A braze-free device for heating a substrate, the braze-free device comprising:
- a heater block body,
- a heater block lid on the heater block body;
- and
- a heating element between the heater block lid and the heater block body;
- the the heating element comprising a resistive heating wire having an outer protective sheath and being compressed between the heater block body and the heater block lid along a first direction between the heater block lid and the heater block body to deform the heating element along the first direction,
- the heating element being in continuous physical and thermal contact with the heater block lid and the heater block body without including a braze alloy,
- wherein the outer protective sheath, the heater block body, and the heater block lid are each made of a high temperature metal or alloy having a coefficient of thermal expansion, the coefficients varying by about 0% to about 10%.
A method of constructing a substrate heating device without brazing, the method comprising:
- coiling a resistive heating wire to form a heating element, the resistive heating wire having an outer protective sheath;
- placing the heating element between a heater block body and a heater block lid;
- compressing the heating element between the heater block body and the heater block lid along a first direction between the heater block body and the heater block lid to deform the heating element along the first direction;
- forming substantially continuous physical and thermal contacts between the heating element and the heater block lid and the heating element and the heater block body without including a braze alloy;
- and
- attaching the heater block lid to the heater block body,
- wherein compressing the heating element between the heater block body and the heater block lid compresses an outer diameter of the resistive heating wire in the first direction by about 2.5% to about 20%.
Dependencies are inferred from the claim text.