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US 10,944,943 B2Granted
Image sensor including a transparent conductive layer in a trench
AssigneeSamsung Electronics Co., Ltd.
InventorsSang-Hoon Kim, Byungjun Park
Life of this patent
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Abstract
An image sensor is disclosed. The image sensor includes a substrate including an active region and a dummy region, a plurality of unit pixels on the active region, a transparent conductive layer on a first surface of the substrate, a light-blocking layer on the transparent conductive layer and electrically connected to the transparent conductive layer, the light-blocking layer having a grid structure adjacent light transmission regions, and a pad electrically connected to the light-blocking layer, on the dummy region.
Claims19
An image sensor, comprising:
- a substrate comprising an active region and a dummy region;
- a plurality of unit pixels on the active region;
- a transparent conductive layer on a first surface of the substrate;
- a light-blocking layer on the transparent conductive layer and electrically connected to the transparent conductive layer, the light-blocking layer having a grid structure adjacent light transmission regions;
- and
- a pad electrically connected to the light-blocking layer, wherein the pad is on the dummy region,
- wherein a vertical portion of the transparent conductive layer is in a trench that is adjacent at least one of the plurality of unit pixels, and
- wherein a sidewall of the vertical portion of the transparent conductive layer in the trench is slanted with respect to a horizontal portion of the transparent conductive layer that is substantially parallel to the first surface.
5 more elements
An image sensor, comprising:
- a substrate comprising a first surface and a second surface opposite to the first surface;
- a first device isolation pattern on the first surface, the first device isolation pattern in a trench adjacent a plurality of unit pixels in the substrate;
- a transparent conductive layer on the first device isolation pattern;
- and
- a light-blocking layer on the transparent conductive layer,
- wherein a depth of the trench is less than a thickness of the substrate,
- wherein the transparent conductive layer includes a horizontal portion on the first surface and a vertical portion extending from the horizontal portion into the trench,
- wherein the first device isolation pattern is between the vertical portion and the trench, and covers a bottom of the vertical portion, and
- wherein the light-blocking layer is electrically connected to the horizontal portion.
6 more elements
An image sensor, comprising:
- a substrate comprising a first surface and a second surface opposite to the first surface;
- a trench defining a plurality of unit pixels in the substrate;
- and
- a transparent conductive layer on the first surface of the substrate,
- wherein the transparent conductive layer comprises a vertical portion in the trench, and
- wherein a width of the vertical portion adjacent to the first surface is greater than a width of the vertical portion that is adjacent to and below the second surface of the substrate.
3 more elements
Dependencies are inferred from the claim text.