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US 10,943,772 B2Granted
Refractory metal plates
AssigneeH.C. Starck GmbH
InventorsPeter R. Jepson, Dincer Bozkaya
Life of this patent
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Abstract
A refractory metal plate is provided. The plate has a center, a thickness, an edge, a top surface and a bottom surface, and has a crystallographic texture (as characterized by through, thickness gradient, banding severity; and variation across the plate, for each of the texture components 100//ND and 111//ND, which is substantially uniform throughout the plate.
Claims20
A method of forming a refractory metal plate, the method comprising:
- (A) providing a refractory metal ingot;
- (B) cleaning the ingot;
- (C) cutting the ingot to produce a workpiece therefrom;
- (D) performing a plurality of process cycles, each process cycle comprising (i) upset forging the workpiece, (ii) forging back the workpiece after upset forging the workpiece, and (iii) annealing the workpiece before or after forging back the workpiece;
- (E) cutting the workpiece to produce a plate therefrom;
- (F) asymmetrically rolling the plate one or more times at an angle of incline between 2° and 20° relative to horizontal;
- and
- (G) annealing the rolled plate to achieve substantially full recrystallization.
5 more elements
A method of forming a refractory metal plate, the method comprising:
- (A) cold isostatically pressing a refractory metal powder to a density of 60%-90% to form a preform;
- (B) hot isostatically pressing the preform to a density of approximately 100% to form a billet;
- (C) annealing the billet;
- (D) cutting the billet to produce a plate therefrom;
- (E) asymmetrically rolling the plate one or more times at an angle of incline between 2° and 20° relative to horizontal;
- and
- (F) annealing the rolled plate to achieve substantially full recrystallization.
4 more elements
A method of forming a thin film, the method comprising:
- providing a refractory metal plate having a center, a thickness, an edge, a top surface, and a bottom surface, the refractory metal plate having a crystallographic texture as characterized by through thickness gradient, banding severity, and variation across the plate for at least one of the texture components 100//ND or 111//ND, using electron back-scatter diffraction with a 15 μm step in both the horizontal and vertical directions for each measurement, wherein (i) an average through-thickness gradient is less than or equal to 6% per mm for 111//ND, and (ii) a maximum through-thickness gradient is less than or equal to 13% per mm for 111//ND;
- providing a substrate;
- and
- sputtering the plate to form a film on the substrate, the film comprising the refractory metal.
1 more element
Dependencies are inferred from the claim text.