Detection of damage in matching networks

A match system comprising:

• a variable reactance section to transform an impedance at the output of the variable reactance section to an input-impedance that is presented at an input of the variable reactance section;
• at least one input sensor to measure one or more input-parameters at an input of the variable reactance section;
• at least one output sensor to measure one or more output-parameters at an output of the variable reactance section;
• non-volatile memory, at least, including data defining a model of the variable reactance section;
• means for assessing whether the variable reactance section is at least one of damaged or operating outside of specifications using the one or more input-parameter measurements;
• the one or more output-parameter measurements;
• a reactance setting of the variable reactance section;
• one or more expected parameter values, and the model of the matching network.

A match system comprising:

• a variable reactance section to transform an impedance at the output of the variable reactance section to an input-impedance that is presented at an input of the variable reactance section;
• at least one input sensor to measure one or more input-parameters at an input of the variable reactance section;
• at least one output sensor to measure one or more output-parameters at an output of the variable reactance section;
• a non-transitory computer-readable medium comprising:
• data stored thereon defining a model of, at least, the variable reactance section;
• and
• instructions stored thereon, for execution by a processor, or for configuring a field programmable gate array, the instructions including instructions to:
• measure one or more parameters at a first side of the variable reactance section to obtain at least one measurement-based-attribute at the first side of the variable reactance section;
• measure one or more parameters at a second side of the variable reactance section to obtain at least one measurement-based-attribute at the second side of the variable reactance section, the first and second sides of the variable reactance section are on electrically opposites sides of the variable reactance section;
• obtain a present reactance setting of the variable reactance section;
• access the model of the variable reactance section using the at least one measurement-based-attribute at the first side of the match network to obtain at least one expected-attribute at the second side of the match network based upon the present reactance setting of the match network;
• and
• contrast the at least one measurement-based-attribute with the at least one expected-attribute to assess whether the match network is at least one of damaged or operating outside of specifications.