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US 10,942,448 B2Granted
Repatternable nanoimprint lithography stamp
AssigneeInternational Business Machines Corporation
InventorsBrandon M. Kobilka, Joseph Kuczynski, Jason T. Wertz
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Abstract
A repatternable nanoimprint lithography stamp includes a magnetic substrate and magnetic core nanoparticles. The magnetic substrate includes a magnet and a magnetic mask, and the magnetic core nanoparticles are arranged in a pattern on a surface of the magnetic substrate. The pattern is defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask.
Claims7
A repatternable nanoimprint lithography stamp comprising:
- a magnetic substrate that includes a magnet and a magnetic mask;
- and
- magnetic core nanoparticles arranged in a pattern on a surface of the magnetic substrate, the pattern defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask.
Dependencies are inferred from the claim text.