Heating device and heating chamber

A heating chamber, comprising a heating device and a driving device for driving the heating device to move up and down, wherein:

• the heating device comprises a base plate, at least three supporting columns, a heating assembly, and a heating control system, wherein:
• the at least three supporting columns are arranged vertically on the base plate and are distributed at intervals along a circumferential direction of the base plate, and top ends of the at least three supporting columns form a bearing surface for supporting a to-be-heated member;
• the heating assembly comprises a plurality of heating light tubes and a thermal radiation shielding housing,
• wherein:
• the heating light tubes are divided into a plurality of heating groups based on different areas of the bearing surface, heating light tubes in a same heating group are electrically connected with each other, and heating light tubes in different heating groups are shielded from each other,
• the heating light tubes are disposed above the base plate and below the bearing surface and are configured to radiate heat towards the bearing surface, and a projection of an effective heating area formed by uniform distribution of the heating light tubes on the base plate covers a projection of the bearing surface on the base plate, and
• the thermal radiation shielding housing is arranged at surroundings and a bottom of the heating light tubes to shield heat radiated by the heating light tubes;
• and
• the heating control system comprises a temperature detector, a temperature controller, an adjustment controller, and a plurality of power controllers,
• wherein:
• the temperature detector is configured to detect a real-time temperature at any position of the to-be-heated member in an execution stage of a heating process and send the real-time temperature to the temperature controller,
• the temperature controller is configured to generate a control signal based on the real-time temperature sent from the temperature detector and a preset target temperature and send the control signal to the adjustment controller,
• the adjustment controller is configured to respectively obtain a plurality of control sub-signals corresponding to the heating groups based on the control signal and a heating weighting function and send the plurality of control sub-signals to the plurality of power controllers in a one-to-one correspondence, and
• a number of the power controllers corresponds to a number of the heating groups, and each power controller is configured to adjust heating power of the heating light tubes in a corresponding heating group based on the plurality of control sub-signals.

A heating device, comprising a base plate, at least three supporting columns, a heating assembly, two electrodes, and two electric connectors, wherein:

• the at least three supporting columns are arranged vertically on the base plate and are distributed at intervals along a circumferential direction of the base plate, and top ends of the at least three supporting columns form a bearing surface for supporting a to-be-heated member;
• the heating assembly comprises at lease one heating light tube and a thermal radiation shielding housing, wherein:
• the at least one heating light tube is disposed above the base plate and below the bearing surface and is configured to radiate heat towards the bearing surface, and a projection of an effective heating area formed by uniform distribution of the at least one heating light tube on the base plate covers a projection of the bearing surface on the base plate, and
• the thermal radiation shielding housing is configured to shield heat radiated by the at least one heating light tube towards surroundings and a bottom of the at least one heating light tube;
• the two electrodes are disposed on the base plate at a position close to a central position of the base plate, upper and lower ends of each electrode being located above and below the base plate, respectively;
• and
• the two electric connectors are located between the thermal radiation shielding housing and the base plate, one ends of the electric connectors being respectively connected to the electrodes, and the other ends of the electric connectors being electrically connected to the at least one heating light tube.