Processing apparatus
AssigneeDisco Corporation
InventorsKeiji Kashiwagi, Satoshi Miyata
Life of this patent
Estimating the term…
Abstract
A cutting apparatus includes a chuck table that holds a workpiece, a processing unit that forms a processed groove in the workpiece, an imaging unit that images the workpiece, a display unit that displays a captured image of a processed groove imaged by the imaging unit, and a control unit that executes display control of a display screen of the display unit. The control unit causes a mark that indicates the latest processed groove based on the Y-coordinate of the latest processed groove to be displayed on the display unit while being superimposed on a captured image.
Claims20
A processing apparatus comprising:
- a chuck table that holds a workpiece;
- a processing unit that forms a plurality of processed grooves in the workpiece held by the chuck table including a latest processed groove;
- a processing feed mechanism that relatively moves the chuck table and the processing unit in a processing feed direction that is an X-axis direction;
- an indexing feed mechanism that relatively moves the chuck table and the processing unit in an indexing feed direction that is a Y-axis direction perpendicular to the processing feed direction;
- an imaging unit that images the workpiece held by the chuck table including an area containing the latest processed groove;
- a display unit that displays a captured image of the latest processed groove obtained by imaging, by the imaging unit, the latest processed groove formed through processing the workpiece by the processing unit;
- and
- a control unit comprising a processor,
- wherein the control unit includes
- a memory that stores a Y-coordinate of the latest processed groove, and
- wherein the processor causes a mark that identifies the location of the latest processed groove based on the Y-coordinate to be displayed in a superimposed manner on the captured image displayed on the display unit.
A method of processing a workpiece using a processing apparatus comprising a chuck table that holds a workpiece;
- a processing unit that forms a processed groove in the workpiece held by the chuck table;
- a processing feed mechanism that relatively moves the chuck table and the processing unit in a processing feed direction that is an X-axis direction;
- an indexing feed mechanism that relatively moves the chuck table and the processing unit in an indexing feed direction that is a Y-axis direction perpendicular to the processing feed direction;
- an imaging unit that images the workpiece held by the chuck table;
- a display unit;
- a processor;
- and a memory that stores a Y-coordinate of a latest processed groove, the method comprising:
- displaying on the display unit a captured image of the workpiece including an area of the workpiece containing a portion of a latest processed groove obtained by imaging, by the imaging unit, an area of the workpiece containing the latest processed groove formed through processing the workpiece by the processing unit;
- and
- displaying in a superimposed manner on the display unit a mark that indicates the location of the latest processed groove displayed on the display unit.
Dependencies are inferred from the claim text.