Joined body and elastic wave element
AssigneeNGK Insulators, Ltd.
InventorsMasashi Goto, Tomoyoshi Tai, Mai Minoura
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Abstract
A bonded body includes a supporting substrate and piezoelectric material layer. The supporting substrate is composed of sialon. The material of the piezoelectric material layer is LiAO3 (A represents one or more element selected from the group consisting of niobium and tantalum). It is included an interface layer present along an interface between the supporting body and piezoelectric material layer and a supporting substrate-side intermediate layer present between the interface layer and supporting substrate. Each of the interface layer and supporting substrate-side intermediate layer contains nitrogen, oxygen, aluminum, silicon and one or more element selected from the group consisting of niobium and tantalum as main components.
Claims7
A bonded body comprising a supporting substrate and a piezoelectric material layer, said supporting substrate comprising sialon, and said piezoelectric material layer comprising a material comprising LiAO3 (A represents one or more element selected from the group consisting of niobium and tantalum), wherein
- said bonded body comprises an interface layer present along an interface between said supporting substrate and said piezoelectric material layer and a supporting substrate-side intermediate layer present between said interface layer and said supporting substrate, and
- each of said interface layer and said supporting substrate-side intermediate layer comprises nitrogen, oxygen, aluminum, silicon and one or more element selected from the group consisting of niobium and tantalum.
Dependencies are inferred from the claim text.