Embedded pad structures of three-dimensional memory devices and fabrication methods thereof
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsJun Chen, Zhiliang Xia, Li Hong Xiao
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsJun Chen, Zhiliang Xia, Li Hong Xiao
Estimating the term…
Embodiments of 3D memory devices and fabricating methods thereof are disclosed. The device comprises an array device semiconductor structure comprising an array interconnect layer disposed on the alternating conductor/dielectric stack and including a first interconnect structure. The device further comprises a peripheral device semiconductor structure comprising a peripheral interconnect layer disposed on a peripheral device and including a second interconnect structure. The device further comprises a pad embedded in the array device semiconductor structure or the peripheral interconnect layer, and a pad opening exposing a surface of the pad. The array interconnect layer is bonded with the peripheral interconnect layer, and the pad is electrically connected with the peripheral device through the first interconnect structure or the second interconnect structure.
A 3D memory device, comprising:
Dependencies are inferred from the claim text.