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US 10,923,330 B2Granted
Surface polymer coatings
AssigneeEuroplasma NV
InventorsFilip Legein, Frank Ferdinandi
Life of this patent
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Abstract
A plasma chamber (11′) for coating a substrate with a polymer layer, the plasma chamber includes a first electrode set (14′) and a second electrode set (14′), the first and second electrode sets are arranged either side of a sample chamber for receiving a substrate, wherein the first and second electrode sets include plural electrode layers (141′, 142′) and wherein each electrode set includes plural radiofrequency electrode layers or plural ground electrode layers for coating polymer to each surface of a substrate.
Claims10
A method for coating a substrate with a polymer layer, which method comprises:
- locating a first electrode set and a second electrode set within a plasma chamber, wherein each electrode set comprises an inner electrode layer and a pair of outer electrode layers and wherein the inner electrode layer is a radiofrequency electrode layer and the outer electrode layers are ground electrode layers respectively;
- placing a substrate between the first and second electrode sets so that an outer electrode layer of each electrode set faces the substrate;
- introducing a monomer into the plasma chamber;
- actuating each said radiofrequency electrode layer in order to activate a plasma;
- and
- exposing surfaces of the substrate to the plasma such that a polymer layer is deposited on each surface.
3 more elements
Dependencies are inferred from the claim text.