Phosphor screen for MEMS image intensifiers
AssigneeElbit Systems of America, LLC
InventorsArlynn W. Smith, Dan CHiLCOTT
Life of this patent
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Abstract
A phosphor screen for a Micro-Electro-Mechanical-Systems (MEMS) image intensifier includes a wafer structure, a lattice of interior walls, a thin film phosphor layer, and a reflective metal layer. The wafer structure has a naturally opaque top layer and an active area defined within the naturally opaque top layer. The lattice of interior walls is formed, within the active area, from the naturally opaque top layer. The thin film phosphor layer is disposed in the active area, between the lattice of interior walls. The reflective metal layer that is disposed atop the thin film phosphor layer. In at least some instances, the thin film phosphor layer is a non-particle phosphor layer.
Claims19
A phosphor screen for a microelectromechanical image intensifier, comprising:
- a wafer structure with a naturally opaque top layer and an active area defined within the naturally opaque top layer;
- a lattice of interior walls formed from the naturally opaque top layer to define a plurality of pixels within the active area;
- a thin film phosphor layer that is disposed directly on a bottom of each pixel of the plurality of pixels, between the lattice of interior walls;
- and
- a reflective metal layer that is disposed atop the thin film phosphor layer, wherein the phosphor screen is configured to receive a plurality of electrons from a component spaced apart from the phosphor screen and the interior walls extend above the reflective metal layer so that the interior walls can absorb or reflect one or more electrons, of the plurality of electrons, that backscatter in one of the plurality of pixels, thereby preventing the one or more electrons from traveling laterally into another pixel of the plurality of pixels,
- wherein the thin film phosphor layer has a thickness in the range of approximately 200-300 nanometers,
- wherein the thin film phosphor layer is annealed at a temperature in a range of 600° C. to 900° C.
A method of forming a phosphor screen for a microelectromechanical image intensifier, comprising:
- creating a pattern of pixels by forming a lattice of interior walls in an active area of a naturally opaque top layer of a wafer;
- growing a phosphor layer directly on a bottom of each pixel of the pattern of pixels;
- annealing the phosphor layer;
- and
- depositing a reflective metal over the phosphor layer, wherein the phosphor screen is configured to receive a plurality of electrons from a component spaced apart from the phosphor screen and the interior walls extend above the reflective metal layer so that the interior walls can absorb or reflect one or more electrons, of the plurality of electrons, that backscatter in one of the pattern of pixels, thereby preventing the one or more electrons from traveling laterally into another pixel of the pattern of pixels,
- wherein the phosphor layer has a thickness in the range of approximately 200-300 nanometers,
- wherein the phosphor layer is annealed at a temperature in a range of 600° C. to 900° C.
A phosphor screen for a microelectromechanical image intensifier, comprising:
- a wafer structure with an active area;
- a lattice of depressions formed in a naturally opaque top layer of the wafer within the active area so that the naturally opaque layer defines a plurality of pixels, wherein each depression in the lattice of depressions includes a bottom and a plurality of side walls;
- a non-particle phosphor layer that is disposed directly on the bottom of each of the depressions;
- and
- a reflective metal layer that is disposed atop the phosphor layer, wherein the phosphor screen is configured to receive a plurality of electrons from a component spaced apart from the phosphor screen and the plurality of side walls extend above the reflective metal layer so that the plurality of side walls can absorb or reflect one or more electrons, of the plurality of electrons, that backscatter in one of the plurality of pixels, thereby preventing the one or more electrons from traveling laterally into another pixel of the plurality of pixels,
- wherein the non-particle phosphor layer has a thickness in the range of approximately 200-300 nanometers,
- wherein the non-particle phosphor layer is annealed at a temperature in a range of 600° C. to 900° C.
Dependencies are inferred from the claim text.