Imaging device, imaging method, and imaging system

An imaging device, comprising:

• a charged particle source (1), configured to emit a charged particle beam;
• a convergence system (2), configured to constrain and converge the charged particle beam;
• a scanning control system (3), configured to control the charged particle beam to scan a sample;
• the sample (4);
• a detection module (5), configured to receive the charged particle beam and detect a signal strength of the charged particle beam to acquire at least one diffraction pattern;
• and
• a spectral analysis module (6) disposed below the detection module (5), configured to analyze spectroscopic characteristics of the charged particle beam to acquire spectral data,
• wherein the detection module (5) comprises a plurality of pixelated detector units (7) and the detection module (5) is provided with a hole (8) thereon,
• wherein the imaging device performs hollow ptychography on the at least one diffraction pattern based on a hollow ptychography algorithm to reconstruct an image, and
• wherein the reconstructed image is obtained through computer calculation.