Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods
AssigneeGeorgia Tech Research Corporation
InventorsHaoran Wen, Farrokh Ayazi, Anosh Daruwalla
Life of this patent
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Abstract
A bulk acoustic wave resonator apparatus includes a resonator member having an annulus shape, and at least one anchor structure coupling the resonator member to a substrate. A perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle relative to a plane defined by a surface of the resonator member. The surface of the resonator member may be defined by a (100) crystal plane, and the angle of the respective sidewalls may be defined by a (111) crystal plane. Related fabrication methods are also discussed.
Claims20
A bulk acoustic wave resonator apparatus, comprising:
- a resonator member having an annulus shape;
- and
- at least one anchor structure coupling the resonator member to a substrate,
- wherein a perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle of about 30° to about 60° relative to a surface of the resonator member adjacent the substrate.
A method of fabricating a bulk acoustic wave resonator apparatus, the method comprising:
- forming a resonator member having an annulus shape that is coupled to a substrate by at least one anchor structure, wherein a perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle of about 30° to about 60° relative to a surface of the resonator member adjacent the substrate.
A microelectromechanical resonator, comprising:
- an annulus-shaped single-crystal semiconductor resonator member attached to a substrate by at least one anchor, said resonator member having a slanted sidewall that extends along a (111) crystal plane thereof and intersects with a surface of said resonator member that extends along a (100) crystal plane;
- and
- a slanted tuning electrode capacitively coupled to the slanted sidewall.
Dependencies are inferred from the claim text.