Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method

A pumping apparatus for feeding a liquid, the pumping apparatus comprising:

• a chamber with a reservoir as an interior space that stores the liquid and a movable part that contacts the reservoir, a volume of the reservoir being changed by displacement of the movable part;
• and
• a drive unit that displaces the movable part;
• the chamber having at least three openings, or a first opening, a second opening, and a third opening formed therein that are in communication with the reservoir,
• the second opening being higher in level than the first opening,
• the third opening being at a lowest level with respect to the reservoir and being positioned along an outer edge of the movable part,
• any two of the three openings being used for normal liquid feed of sucking the liquid into the reservoir and feeding out the liquid from the reservoir by controlling circulation of the liquid in synchronization with the displacement of the movable part,
• the reservoir of the chamber being formed in a truncated cone shape having a vertical face and a slope face, the slope face being connected to a circle whose diameter is larger than a diameter of the vertical face,
• the third opening being provided on a lower slope face of the slope face,
• the movable part and the slope face being provided so as to sandwich the circle, and
• the third opening being used for dispensing the liquid within the reservoir guided along the slope face and the outer edge of the movable part by introducing gas through at least one of the first opening and the second opening into the reservoir.