Atom probe inspection device, field ion microscope, and distortion correction method

An atom probe inspection device, comprising:

• one or more processors configured to:
• change, between a first condition and a second condition, a two-dimensional position at which an ion that has been separated from a surface of a sample is detected on a detection surface of a position sensitive detector;
• detect two-dimensional position information of the ion detected on the detection surface and a flying time of the ion from the sample to the detection surface;
• identify a type of an element of the ion detected on the detection surface from the detected flying time;
• generate first information on the basis of a first two-dimensional position detected under the first condition and the type of the element and generate second information on the basis of a second two-dimensional position detected under the second condition and the type of the element;
• and
• generate a reconstruction image of the sample on the basis of the first information generated and the second information generated;
• and
• a reflection lens which generates an electric field to reflect a trajectory of the ion separated from the sample and causes the ion to fly toward the position sensitive detector, wherein the one or more processors are further configured to:
• control a position of the reflection lens, and
• generate the first information at a first position under the first condition that the reflection lens is moved to the first position, and
• generate the second information at a second position different from the first position under the second condition that the reflection lens is moved to the second position.

An atom probe inspection device, comprising

• one or more processors configured to:
• change, between a first condition and a second condition, a two-dimensional position at which an ion that has been separated from a surface of a sample is detected on a detection surface of a position sensitive detector;
• detect two-dimensional position information of the ion detected on the detection surface and a flying time of the ion from the sample to the detection surface;
• identify a type of an element of the ion detected on the detection surface from the detected flying time;
• generate first information on the basis of a first two-dimensional position detected under the first condition and the type of the element and generate second information on the basis of a second two-dimensional position detected under the second condition and the type of the element;
• and
• generate a reconstruction image of the sample on the basis of the first information generated and the second information generated;
• and
• a reflection lens which generates an electric field to reflect a trajectory of the ion separated from the sample to cause the ion to fly toward the position sensitive detector, wherein the one or more processors are further configured to:
• control generation of the electric field by the reflection lens,
• generate the first information under the first condition that the reflection lens is controlled to generate a certain electric field, and
• generate the second information under the second condition that the reflection lens is controlled to generate a different electric field from the certain electric field.

A field ion microscope, comprising

• one or more processors configured to:
• change, between a first condition and a second condition, a two-dimensional position at which an ion that has been separated from a surface of a sample is detected on a detection surface of a position sensitive detector;
• detect two-dimensional position information of the ion detected on the detection surface;
• generate first information on the basis of a first two-dimensional position detected under the first condition and generate second information on the basis of a second two-dimensional position detected wider the second condition;
• and
• generate a reconstruction image of the sample by estimating a center of a curvature circle contacting a point on the sample from which the ion has been separated, on the basis of an amount of distortion of corresponding locations on the first information and the second information.

A distortion correction method, comprising:

• changing, between a first condition and a second condition, a two-dimensional position at which an ion that has been separated from a surface of a sample is detected on a detection surface of a position sensitive detector;
• detecting two-dimensional position information of the ion detected on e detection surface and a flying time of the ion from the sample to the detection surface;
• identifying a type of an element of the ion detected on the detection surface from the detected flying time;
• generating first information on the basis of a first two-dimensional position detected under the first condition and the type of the element and generating second information on the basis of a second two-dimensional position detected under the second condition and the type of the element;
• and
• generating a reconstruction image of the sample by estimating a center of a curvature circle contacting a point on the sample from which the ion has been separated, on the basis of an amount of distortion of corresponding locations on the first information and the second information.