Substrate processing system and substrate processing apparatus

A substrate processing apparatus, comprising:

• a first controller configured to acquire event data generated at a time of transferring a substrate and alarm data generated at a time of occurrence of a transfer error;
• a recorder configured to, while recording a transfer operation of the substrate as first image data, record the transfer operation of the substrate as second image data having a higher resolution than the first image data;
• a second controller configured to store the first image data recorded by the recorder in a first memory based on the event data, and store the second image data recorded by the recorder in a second memory based on the alarm data;
• and
• an operating controller configured to display at least the first image data and the second image data,
• wherein the second controller is configured to cause the same screen to display both the first image data and the second image data recorded at the time of occurrence of the transfer error.