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US 10,901,316 B2Granted
Iodine-containing polymers for chemically amplified resist compositions
AssigneeRohm and Haas Electronic Materials LLC
InventorsEmad Aqad, James W. Thackeray, James F. Cameron
Life of this patent
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Abstract
A monomer having formula (I): wherein in formula (I), groups and variables are the same as described in the specification.
Claims10
A monomer having formula (I):
- wherein in formula (I):
- W is —(C═O)O—, —O(C═O)—, —O(SO2)—, —(SO2)O—, —NH(SO2)—, —(SO2)NH—, —NH(CO)—, —(CO)NH—, —SO2—, —SO—,
- Ra is H, F, —CN, a C1-10 alkyl group, or a C1-10 fluoroalkyl group;
- L is a linking group selected from an unsubstituted or substituted C1-20 alkylene group, an unsubstituted or substituted C3-20 cycloalkylene group, an unsubstituted or substituted C6-20 arylene group, and an unsubstituted or substituted C7-20 aralkylene group;
- represents a monocyclic or polycyclic unsubstituted or substituted C6-30 arylene group or a monocyclic or polycyclic unsubstituted or substituted C3-30 heteroarylene group, wherein “*” indicates a point of attachment to a neighboring group or atom;
- “I” represents iodine;
- X is selected from —F, —Cl, —Br, a hydroxyl group, a cyano group, a nitro group, an amino group, an amidino group, a hydrazine group, a hydrazone group, a carboxylic acid group or a salt thereof, a sulfonic acid group or a salt thereof, a phosphoric acid group or a salt thereof, an unsubstituted or substituted C1-30 alkyl group, an unsubstituted or substituted C2-30 alkenyl group, an unsubstituted or substituted C2-30 alkynyl group, an unsubstituted or substituted C1-30 alkoxy group, an unsubstituted or substituted C3-30 cycloalkyl group, an unsubstituted or substituted C1-30 heterocycloalkyl group, an unsubstituted or substituted C3-30 cycloalkenyl group, an unsubstituted or substituted C1-30 heterocycloalkenyl group, an unsubstituted or substituted C6-30 aryl group, an unsubstituted or substituted C6-30 aryloxy group, an unsubstituted or substituted C6-30 arylthio group, an unsubstituted or substituted C7-30 arylalkyl group, an unsubstituted or substituted C1-30 heteroaryl group, an unsubstituted or substituted C2-30 heteroaryloxy group, an unsubstituted or substituted C2-30 heteroarylthio group, or an unsubstituted or substituted C3-30 heteroarylalkyl group,
- wherein at least one X comprises —C(CF3)2OH;
- m is an integer of 1 or greater, provided that when m is an integer of 2 or greater, two adjacent groups X optionally form a ring;
- and
- n is an integer of 1 or greater.
8 more elements
A copolymer comprising a polymerized product of an acid-deprotectable monomer and a monomer having formula (I):
- wherein in formula (I):
- W is —(C═O)O—or —O(C═O)—,
- Ra is H, F, —CN, a C1-10 alkyl group, or a C1-10 fluoroalkyl group;
- L is a linking group selected from an unsubstituted or substituted C1-20 alkylene group, an unsubstituted or substituted C3-20 cycloalkylene group, an unsubstituted or substituted C6-20 arylene group, and an unsubstituted or substituted C7-20 aralkylene group;
- represents a monocyclic or polycyclic unsubstituted or substituted C6-30 arylene group or a monocyclic or polycyclic unsubstituted or substituted C3-30 heteroarylene group, wherein “*” indicates a point of attachment to a neighboring group or atom;
- “I” represents iodine;
- X is selected from —F, —Cl, —Br, a hydroxyl group, a cyano group, a nitro group, an amino group, an amidino group, a hydrazine group, a hydrazone group, a carboxylic acid group or a salt thereof, a sulfonic acid group or a salt thereof, a phosphoric acid group or a salt thereof, an unsubstituted or substituted C1-30 alkyl group, an unsubstituted or substituted C2-30 alkenyl group, an unsubstituted or substituted C2-30 alkynyl group, an unsubstituted or substituted C1-30 alkoxy group, an unsubstituted or substituted C3-30 cycloalkyl group, an unsubstituted or substituted C3-30 heterocycloalkyl group, an unsubstituted or substituted C4-30 cycloalkenyl group, an unsubstituted or substituted C4-30 heterocycloalkenyl group, an unsubstituted or substituted C6-30 aryl group, an unsubstituted or substituted C6-30 aryloxy group, an unsubstituted or substituted C6-30 arylthio group, an unsubstituted or substituted C7-30 arylalkyl group, an unsubstituted or substituted C4-30 heteroaryl group, an unsubstituted or substituted C4-30 heteroaryloxy group, an unsubstituted or substituted C4-30 heteroarylthio group, or an unsubstituted or substituted C5-30 heteroarylalkyl group,
- wherein X optionally comprises an ester group or —C(CF3)2OH;
- m is an integer of 0 or greater, provided that when m is an integer of 2 or greater, two adjacent groups X optionally form a ring;
- and
- n is an integer of 1 or greater.
8 more elements
Dependencies are inferred from the claim text.