Micromechanical sensor and method for manufacturing a micromechanical sensor
AssigneeRobert Bosch GmbH
InventorsAntoine Puygranier, Denis Gugel, Guenther-Nino-Carlo Ullrich, Johannes Classen, Markus Linck-Lescanne
Life of this patent
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Abstract
A micromechanical sensor, including: a substrate; a movable mass element sensitive in three spatial directions; two x-lateral electrodes for detecting a lateral x-deflection of the movable mass element; two y-lateral electrodes for detecting a lateral y-deflection of the movable mass element; z-electrodes for detecting a z-deflection of the movable mass element; each lateral electrode being fastened on the substrate with the aid of a fastening element; the fastening elements of all electrodes being formed close to a connection element of the movable mass element to the substrate.
Claims8
A micromechanical sensor, comprising:
- a substrate;
- a movable mass element sensitive in three spatial directions;
- two x-lateral electrodes for detecting deflection of the movable mass element due to acceleration in the x-direction;
- two y-lateral electrodes for detecting deflection of the movable mass element due to acceleration in the y-direction;
- and
- z-electrodes for detecting deflection of the movable mass element due to acceleration in the z-direction, wherein each of the electrodes is fastened on the substrate via fastening elements, and the fastening elements of all the electrodes are fastened on a central connection element of the movable mass element to the substrate;
- wherein each of the two x-lateral electrodes and each of the two y-lateral electrodes includes two fastening elements,
- wherein each of the two x-lateral electrodes and each of the two y-lateral electrodes includes a plurality of electrode fingers formed in a third functional layer,
- wherein half of the plurality of x-electrode fingers and half of the plurality of y-electrode fingers are situated on top of the fastening elements formed in a second functional layer, and
- wherein half of the plurality of x-electrode fingers and half of the plurality of y-electrode fingers are directly connected to each other in the third functional layer.
A method for manufacturing a micromechanical sensor, the method comprising:
- providing a substrate;
- providing a movable mass element that is sensitive and movable in three spatial directions;
- forming two x-lateral electrodes for detecting deflection of the movable mass element due to acceleration in the x-direction;
- forming two y-lateral electrodes for detecting deflection of the movable mass element due to acceleration in the y-direction;
- forming two z-electrodes for detecting deflection of the movable mass element due to acceleration in the z-direction;
- and
- fastening all of the electrodes to the substrate on a central connection element of the movable mass element;
- wherein each of the two x-lateral electrodes and each of the two y-lateral electrodes includes two fastening elements,
- wherein each of the two x-lateral electrodes and each of the two y-lateral electrodes includes a plurality of electrode fingers formed in a third functional layer,
- wherein half of the plurality of x-electrode fingers and half of the plurality of y-electrode fingers are situated on top of the fastening elements formed in a second functional layer, and
- wherein half of the plurality of x-electrode fingers and half of the plurality of y-electrode fingers are directly connected to each other in the third functional layer.
Dependencies are inferred from the claim text.