Pressure sensor and method of producing the same
AssigneeTohoku University
InventorsShuji Tanaka, Joerg Froemel
Life of this patent
Estimating the term…
Abstract
Provided are a pressure sensor which exhibits exceptional performance and a method of producing the same. The pressure sensor includes: a silicon substrate having a cavity; a diaphragm which is formed of a metallic glass and has a tensile stress in a range in which a resonant frequency is higher than an audible range; and a counter electrode which is insulated from the diaphragm and has a plurality of holes. The diaphragm and the counter electrode are disposed on the silicon substrate to face each other with a gap therebetween, the diaphragm and the counter electrode being released from the silicon substrate by the cavity.
Claims12
A pressure sensor, comprising:
- a silicon substrate having a cavity;
- a diaphragm which is formed of a metallic glass and has a tensile stress in a range in which a resonant frequency is higher than an audible range;
- and
- a counter electrode insulated from the diaphragm and having a plurality of holes,
- wherein the diaphragm and the counter electrode are disposed on the silicon substrate to face each other with a gap therebetween, the diaphragm and the counter electrode being released from the silicon substrate by the cavity.
Dependencies are inferred from the claim text.