Spectral reflectometer
AssigneeSeiko Epson Corporation
InventorTsugio Gomi
Life of this patent
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Abstract
A spectral reflectometer includes a first substrate, a first light emitting element and a second light emitting element in which a height of a first light emitting portion which is the height from the first substrate to a first light emitting portion of the first light emitting element, which is installed on the first substrate and a height of a second light emitting portion which is the height from the first substrate to a second light emitting portion of the second light emitting element are different, and a light receiver that receives light, in which the second light emitting element having a high height of the second light emitting portion is installed at a position close to an optical axis of the light received by the light receiver from the first light emitting element having a low height of the first light emitting portion.
Claims10
A spectral reflectometer comprising:
- a substrate;
- a plurality of light emitters that are installed on the substrate, each light emitter having a light emitting portion;
- and
- a light receiver that receives light,
- wherein the plurality of light emitters have different wavelength distributions, and
- wherein the light emitting portion of a first one of the light emitters is further in height from the substrate than the light emitting portion of a second one of the light emitters, and the first one of the light emitters is installed at a position closer to an optical axis of the light received by the light receiver than the second one of the light emitters.
Dependencies are inferred from the claim text.