Back to results
US 10,897,238 B2Granted
Piezoelectric package-integrated contour mode filter devices
AssigneeIntel Corporation
InventorsFeras Eid, Georgios C. Dogiamis, Valluri R. Rao, Adel A. Elsherbini, Johanna M. Swan, Telesphor Kamgaing, Vijay K. Nair
Life of this patent
Estimating the term…
Abstract
Embodiments of the invention include a filtering device that includes a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material. The piezoelectric filtering device expands and contracts laterally in a plane of an organic substrate in response to application of an electrical signal between the first and second electrodes.
Claims19
A filtering device, comprising:
- a vibrating stack that includes a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material, the piezoelectric material vertically between the first electrode and the second electrode, the first electrode and the second electrode forming an electrode pair, wherein the vibrating stack expands and contracts laterally in a plane of an organic substrate having organic layers in response to application of an electrical signal to the piezoelectric material between the first and second electrodes, wherein the filtering device is positioned above a cavity of the organic substrate, wherein the first electrode extends only partially across the cavity, and wherein the first electrode is coupled directly to a first conductive structure in the organic substrate, and the second electrode is coupled directly to a second conductive structure in the organic substrate.
A filtering device comprising:
- an input electrode for receiving an input electrical signal;
- a first piezoelectric layer in contact with the input electrode;
- a ground electrode in contact with the first piezoelectric layer;
- a second piezoelectric layer in contact with the ground electrode;
- and
- an output electrode in contact with the second piezoelectric layer, wherein the filtering device oscillates within an organic substrate in response to application of the input electrical signal between the input electrode and ground electrode.
3 more elements
A computing device comprising:
- at least one processor to process data;
- and
- a package substrate coupled to the at least one processor, the package substrate includes a plurality of organic dielectric layers and a plurality of conductive layers to form the package substrate which includes a piezoelectric filtering device having a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material, the piezoelectric material vertically between the first electrode and the second electrode, the first electrode and the second electrode forming an electrode pair, wherein the piezoelectric filtering device expands and contracts laterally in a plane of the package substrate in response to application of an electrical signal between the first and second electrodes, wherein the piezoelectric filtering device is positioned above a cavity of the package substrate, wherein the first electrode extends only partially across the cavity, and wherein the first electrode is coupled directly to a first conductive structure in the package substrate, and the second electrode is coupled directly to a second conductive structure in the package substrate.
A filtering device, comprising:
- a vibrating stack that includes a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material, wherein the vibrating stack expands and contracts laterally in a plane of an organic substrate having organic layers in response to application of an electrical signal to the piezoelectric material between the first and second electrodes, wherein the filtering device comprises a contour mode resonator with a resonator having a first static unexcited mode and an associated first shape and also a second excited resonant mode and an associated different second shape, wherein the contour mode resonator comprises a single port design with the first electrode being coupled to a first electrical connection of the organic substrate in proximity to a first end of a cavity of the organic substrate and the second electrode being coupled to a second electrical connection of the organic substrate in proximity to a second end of the cavity.
A filtering device, comprising:
- a vibrating stack that includes a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material, wherein the vibrating stack expands and contracts laterally in a plane of an organic substrate having organic layers in response to application of an electrical signal to the piezoelectric material between the first and second electrodes, wherein the filtering device comprises a contour mode resonator with a resonator having a first static unexcited mode and an associated first shape and also a second excited resonant mode and an associated different second shape, wherein the contour mode resonator comprises a single port design with the first and second electrodes being coupled to first and second electrical connections respectively of the organic substrate in proximity to a first end of a cavity of the organic substrate.
A filtering device, comprising:
- a vibrating stack that includes a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material, the piezoelectric material vertically between the first electrode and the second electrode, the first electrode and the second electrode forming an electrode pair, wherein the vibrating stack expands and contracts laterally in a plane of an organic substrate having organic layers in response to application of an electrical signal to the piezoelectric material between the first and second electrodes, wherein the filtering device comprises a contour mode resonator with a resonator having a first static unexcited mode and an associated first shape and also a second excited resonant mode and an associated different second shape.
Dependencies are inferred from the claim text.