Semiconductor device

A semiconductor device, comprising:

• a first electrode extending along a first direction;
• a second electrode including a portion extending along the first direction;
• a third electrode extending along the first direction, a position of the second electrode in a second direction being between a position of the third electrode in the second direction and a position of the first electrode in the second direction, the second direction crossing the first direction, a distance along the second direction between the third electrode and the second electrode being shorter than a distance along the second direction between the second electrode and the first electrode;
• a first layer including a first partial region and a second partial region, a direction from the first layer toward the first electrode, a direction from the first partial region toward the second electrode, and a direction from the first partial region toward the third electrode being aligned with a third direction crossing a plane including the first direction and the second direction;
• a first member including a first region, the first region being conductive and being provided, in the third direction, between the first partial region and the second electrode and between the first partial region and the third electrode;
• a first semiconductor region including Alx1Ga1-x1N (0≤x1<1) and being provided, in the third direction, between the first member and the first electrode, between the first member and the second electrode, and between the first member and the third electrode;
• a second semiconductor region including Alx2Ga1-x2N (0<x2≤1 and x1<x2), the first semiconductor region being between the first member and the second semiconductor region in the third direction;
• and
• a conductive portion electrically connected to the first electrode, a direction from the second partial region toward the conductive portion being aligned with the third direction, a length along the second direction of the conductive portion being longer than a length along the second direction of the first electrode,
• the first semiconductor region including a first portion overlapping the conductive portion in the third direction,
• the first member having a first hole provided between the second partial region and the first portion in the third direction.

A semiconductor device, comprising:

• a first electrode extending along a first direction;
• a second electrode including a portion extending along the first direction;
• a third electrode extending along the first direction, a position of the second electrode in a second direction being between a position of the third electrode in the second direction and a position of the first electrode in the second direction, the second direction crossing the first direction, a distance along the second direction between the third electrode and the second electrode being shorter than a distance along the second direction between the second electrode and the first electrode;
• a first member including a first region and a third region, a conductivity of the third region being lower than a conductivity of the first region, a direction from the third region toward the first electrode, a direction from the first region toward the second electrode, and a direction from the first region toward the third electrode being aligned with a third direction crossing a plane including the first direction and the second direction;
• a first semiconductor region including Alx1Ga1-x1N (0≤x1<1) and being provided, in the third direction, between the first member and the first electrode, between the first member and the second electrode, and between the first member and the third electrode;
• a second semiconductor region including Alx2Ga1-x2N (0<x2≤1 and x1<x2), the first semiconductor region in the third direction being between the first member and the second semiconductor region;
• and
• a conductive member electrically connected to one of the second electrode or the third electrode,
• the second electrode being between the first semiconductor region and at least a portion of the conductive member in the third direction,
• the conductive member including a connection portion and a first end portion,
• a direction from the one of the second electrode or the third electrode toward the connection portion being aligned with the third direction,
• the connection portion being electrically connected to the one of the second electrode or the third electrode,
• a direction from the connection portion toward the first end portion being aligned with the second direction,
• a position of the first end portion in the second direction being between a position of the connection portion in the second direction and the position of the first electrode in the second direction,
• the first region including a second end portion opposing the third region,
• a position of the second end portion in the second direction being between the position of the first end portion in the second direction and the position of the first electrode in the second direction.