Back to results
US 10,896,921 B2Granted
Manufacturing method of array substrate
AssigneeWuhan China Star Optoelectronics Technology Co., Ltd.
InventorsGuanghui Liu, Xin Zhang, Yuan Yan
Life of this patent
Estimating the term…
Abstract
A manufacturing method of a display panel is provided and includes providing a substrate; and forming a buffer layer, a polysilicon layer, a gate electrode, an interlayer insulating layer, a first transparent electrode layer, a source electrode and drain electrode line, and a touch control line on the substrate in sequence. A masking process is omitted using a planarization layer as a photoresist layer of the interlayer insulating layer. One more masking process is omitted by forming the pixel electrode, the source electrode and drain electrode line and the touch control line in a same masking process.
Claims10
A manufacturing method of an array substrate, comprising steps of:
- a step S10 of providing a substrate and forming a buffer layer on the substrate;
- a step S20 of forming a polysilicon layer on the buffer layer, wherein the polysilicon layer comprises a source electrode doped area and a drain electrode doped area and a channel area, the source electrode doped area is disposed at one end of the polysilicon layer, the drain electrode doped area is disposed at another end of the polysilicon layer, and the channel area is disposed in a middle of the polysilicon layer;
- and forming a gate insulating layer and a gate electrode, wherein the gate electrode is disposed on the gate insulating layer;
- a step S30 of forming an interlayer insulating layer on the buffer layer, wherein the interlayer insulating layer covers the buffer layer, the polysilicon layer, the gate insulating layer, and the gate electrode;
- a step S40 of forming a planarization layer on the interlayer insulating layer;
- exposing, etching, and developing the interlayer insulating layer and the planarization layer using a first photomask to define a first through hole and a second through hole, wherein the first through hole and the second through hole pass through the interlayer insulating layer and the gate insulating layer to connect with the polysilicon layer;
- a step S50 of forming a transparent electrode layer and a metal layer on the interlayer insulating layer in sequence, and patterning the transparent electrode layer and the metal layer using a second photomask to form a patterned first transparent electrode layer, a source electrode and drain electrode line, and a touch control line, wherein the step S50 specifically comprises:
- a step S501 of depositing the transparent electrode layer and the metal layer on the interlayer insulating layer in sequence, and coating a photoresist layer on the metal layer;
- a step S502 of exposing the photoresist layer using a second photomask, and then etching the photoresist layer to obtain a photoresist pattern;
- etching the transparent electrode layer using a first etching process to obtain a transparent electrode pattern;
- and etching the metal layer using a second etching process to obtain a first metal pattern, wherein the first metal pattern comprises a target metal pattern and a metal pattern to be removed;
- a step S503 of removing photoresist corresponding to a top of the metal pattern to be removed using an ashing process, and removing the metal pattern to be removed using the second etching process;
- and
- a step S504 of stripping residual photoresist to form the first transparent electrode layer, the source electrode and drain electrode line, and the touch control line;
- and
- a step S60 of forming a passivation layer on the source electrode and drain electrode line and the touch control line, forming a patterned second transparent electrode layer on the passivation layer, wherein the touch control line is electrically connected with the second transparent electrode layer.
13 more elements
A manufacturing method of an array substrate, comprising:
- a step S10 of providing a substrate and forming a buffer layer on the substrate;
- a step S20 of forming a polysilicon layer on the buffer layer, wherein the polysilicon layer comprises a source electrode doped area and a drain electrode doped area and a channel area, the source electrode doped area is disposed at one end of the polysilicon layer, the drain electrode doped area is disposed at another end of the polysilicon layer, and the channel area is disposed in a middle of the polysilicon layer;
- and
- forming a gate insulating layer and a gate electrode, wherein the gate electrode is disposed on the gate insulating layer;
- a step S30 of forming an interlayer insulating layer on the buffer layer, wherein the interlayer insulating layer covers the buffer layer, the polysilicon layer, the gate insulating layer, and the gate electrode;
- a step S40 of forming a planarization layer on the interlayer insulating layer;
- exposing, etching, and developing the interlayer insulating layer and the planarization layer using a first photomask to define a first through hole and a second through hole, wherein the first through hole and the second through hole pass through the interlayer insulating layer and the gate insulating layer to connect with the polysilicon layer;
- a step S50 of forming a transparent electrode layer and a metal layer on the interlayer insulating layer in sequence, and patterning the transparent electrode layer and the metal layer using a second photomask to form a patterned first transparent electrode layer, a source electrode and drain electrode line, and a touch control line, wherein the step S50 specifically comprises:
- a step S501 of depositing the transparent electrode layer and the metal layer on the interlayer insulating layer in sequence, and coating a photoresist layer on the metal layer;
- a step S502 of exposing the photoresist layer using a second photomask, and then etching the photoresist layer to obtain a photoresist pattern;
- etching the transparent electrode layer using a first etching process to obtain a transparent electrode pattern;
- and etching the metal layer using a second etching process to obtain a first metal pattern, wherein the first metal pattern comprises a target metal pattern and a metal pattern to be removed;
- a step S503 of removing photoresist corresponding to a top of the metal pattern to be removed using an ashing process, and removing the metal pattern to be removed using the second etching process;
- and
- a step S504 of stripping residual photoresist to form the first transparent electrode layer, the source electrode and drain electrode line, and the touch control line;
- and
- a step S60 of forming a passivation layer on the source electrode and drain electrode line and the touch control line, forming a patterned second transparent electrode layer on the passivation layer, wherein the touch control line is electrically connected with the second transparent electrode layer;
- wherein the first photomask is a normal mask, the second photomask is a halftone mask, the first transparent electrode layer is patterned to form a pixel electrode, and the second transparent electrode layer is patterned to form a common electrode.
15 more elements
Dependencies are inferred from the claim text.