Processing apparatus and processing method
AssigneeTokyo Electron Limited
InventorKeiichi Tanaka
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Abstract
Disclosed is a processing method for performing a processing corresponding to a processing gas in a plurality of processing containers which are connected to a gas supply source, and at least some of which have different lengths of pipes to the gas supply source. The processing method includes simultaneously supplying the processing gas from the gas supply source to the plurality of processing containers, and individually supplying the processing gas from the gas supply source to the plurality of processing containers or to some of the plurality of processing containers.
Claims9
A processing method for performing a processing corresponding to a processing gas in a plurality of processing containers which are connected to a gas supply source, and at least some of which have different lengths of pipes to the gas supply source, the processing method comprising:
- simultaneously supplying the processing gas from the gas supply source to the plurality of processing containers;
- and
- individually supplying the processing gas from the gas supply source to the plurality of processing containers or to some of the plurality of processing containers.
A processing apparatus comprising:
- a gas supply source configured to supply a processing gas;
- a plurality of processing containers connected to the gas supply source and configured to perform a processing corresponding to the processing gas, at least some of the processing containers having different lengths of pipes to the gas supply source;
- and
- a controller configured to execute a processing method including simultaneously supplying the processing gas from the gas supply source to the plurality of processing containers, and individually supplying the processing gas from the gas supply source to the plurality of processing containers or to some of the plurality of processing containers.
Dependencies are inferred from the claim text.