Techniques for revealing a backside of an integrated circuit device, and associated configurations
AssigneeIntel Corporation
InventorsIl-Seok Son, Colin T. Carver, Paul B. Fischer, Patrick Morrow, Kimin Jun
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AssigneeIntel Corporation
InventorsIl-Seok Son, Colin T. Carver, Paul B. Fischer, Patrick Morrow, Kimin Jun
Estimating the term…
Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.
An integrated circuit comprising:
A computing device comprising:
Dependencies are inferred from the claim text.