Excimer laser annealing apparatus
AssigneesBoe Technology Group Co., Ltd., Chengdu Boe Optoelectronics Technology Co., Ltd.
InventorsYu Zhang, Zubin Lv, Yin Xie
Life of this patent
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Abstract
An excimer laser annealing apparatus is provided. The excimer laser annealing apparatus includes: a laser output channel, at least one first intake pipe and at least one second intake pipe, the laser output channel includes two end faces facing to each other and a side face connected with both of the two end faces; the at least one first intake pipe is located on the side face; and the at least one second intake pipe is located on at least one of the two end faces.
Claims20
An excimer laser annealing apparatus, comprising:
- a laser output channel, comprising two end faces facing to each other and a side face connected with both of the two end faces;
- a plurality of first intake pipes, located on the side face;
- and
- a plurality of second intake pipes, located on the two end faces,
- wherein each of the two end faces is provided with at least one second intake pipe, each of the plurality of first intake pipes and each of the plurality of second intake pipes are gas input pipes and are configured to input a gas to the laser output channel, respectively, and a count of the plurality of first intake pipes located on the side face is greater than a count of the plurality of second intake pipes located on the two end faces.
An excimer laser annealing apparatus, comprising:
- a laser output channel, comprising two end faces facing to each other and a side face connected with both of the two end faces;
- at least one first intake pipe, located on the side face;
- at least one second intake pipe, located on at least one of the two end faces;
- and
- a plurality of gas detectors, distributed within the laser output channel,
- wherein each of the plurality of the gas detectors is configured to detect a gas concentration of a position inside the laser output channel where the gas detector is located, and wherein the gas detector is inside the laser output channel, a first interval is provided between the gas detector and the first intake pipe, and a second interval is provided between the gas detector and the second intake pipe.
An excimer laser annealing apparatus, comprising:
- a laser output channel, comprising two end faces facing to each other and a side face connected with both of the two end faces;
- a plurality of first intake pipes, located on the side face;
- and
- a plurality of second intake pipes, located on the two end faces,
- wherein each of the two end faces is provided with at least one second intake pipe, each of the plurality of first intake pipes and each of the plurality of second intake pipes are gas input pipes and are configured to input a gas to the laser output channel, respectively, and
- wherein positions where the plurality of the first intake pipes are connected with the side face and positions where the plurality of second intake pipes are connected with the end faces, constitute a plane, and the laser output channel is divided into two equal parts by the plane.
Dependencies are inferred from the claim text.